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Title: Wafer-Level Packaging of Aluminum Nitride RF MEMS Filters.

Abstract not provided.
Authors:
; ; ; ;
Publication Date:
OSTI Identifier:
1255760
Report Number(s):
SAND2015-4170C
590295
DOE Contract Number:
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the ECTC held May 25-29, 2015 in San Diego, Ca.
Research Org:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
Language:
English