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Title: Stabilizing laser energy density on a target during pulsed laser deposition of thin films

A process for stabilizing laser energy density on a target surface during pulsed laser deposition of thin films controls the focused laser spot on the target. The process involves imaging an image-aperture positioned in the beamline. This eliminates changes in the beam dimensions of the laser. A continuously variable attenuator located in between the output of the laser and the imaged image-aperture adjusts the energy to a desired level by running the laser in a "constant voltage" mode. The process provides reproducibility and controllability for deposition of electronic thin films by pulsed laser deposition.
Authors:
;
Publication Date:
OSTI Identifier:
1255208
Report Number(s):
9,353,435
14/042,167
DOE Contract Number:
AC52-06NA25396
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Sep 30
Research Org:
Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS