Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library
Journal Article
·
· Ultramicroscopy
- Sponsoring Organization:
- USDOE
- Grant/Contract Number:
- AC02-06CH11357
- OSTI ID:
- 1254034
- Journal Information:
- Ultramicroscopy, Journal Name: Ultramicroscopy Vol. 154 Journal Issue: C; ISSN 0304-3991
- Publisher:
- ElsevierCopyright Statement
- Country of Publication:
- Netherlands
- Language:
- English
Cited by: 78 works
Citation information provided by
Web of Science
Web of Science
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