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Title: Conformal Polymer CVD

Authors:
Publication Date:
OSTI Identifier:
1252638
Report Number(s):
LLNL-BOOK-658857
DOE Contract Number:
AC52-07NA27344
Resource Type:
Book
Publisher:
Chemical Vapor Deposition Polymers: Fabrication of Organic Surfaces and Devices, Conformal Polymer CVD, Wiley, Weinheim, 2015, pp. 87-109
Research Org:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY