Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices

Buja, Federico; Kokorian, Jaap; Sumant, Anirudha V.; van Spengen, W. Merlijn

doi:10.1016/j.diamond.2015.02.008

Title: Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices

Journal Article · Fri May 01 00:00:00 EDT 2015 · Diamond and Related Materials

DOI:https://doi.org/10.1016/j.diamond.2015.02.008· OSTI ID:1249848

Buja, Federico; Kokorian, Jaap; Sumant, Anirudha V.; van Spengen, W. Merlijn

View Accepted Manuscript (Publisher)

Cite

Export

Save

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1249848

Journal Information:: Diamond and Related Materials, Journal Name: Diamond and Related Materials Vol. 55 Journal Issue: C; ISSN 0925-9635

Publisher:: ElsevierCopyright Statement

Country of Publication:: Netherlands

Language:: English

Citation Metrics:

Cited by: 10 works

Citation information provided by
Web of Science

References (31)

Surface science, MEMS and NEMS: Progress and opportunities for surface science research performed on, or by, microdevices Berman, D.; Krim, J. Progress in Surface Science, Vol. 88, Issue 2, p. 171-211 https://doi.org/10.1016/j.progsurf.2013.03.001	journal	May 2013
Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments Maboudian, Roya; Ashurst, W. Robert; Carraro, Carlo Sensors and Actuators A: Physical, Vol. 82, Issue 1-3 https://doi.org/10.1016/S0924-4247(99)00337-4	journal	May 2000
Termination of diamond surfaces with hydrogen, oxygen and fluorine using a small, simple plasma gun Salvadori, M. C.; Araújo, W. W. R.; Teixeira, F. S. Diamond and Related Materials, Vol. 19, Issue 4 https://doi.org/10.1016/j.diamond.2010.01.002	journal	April 2010
MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films Sumant, Anirudha V.; Auciello, Orlando; Liao, Meiyong MRS Bulletin, Vol. 39, Issue 6 https://doi.org/10.1557/mrs.2014.98	journal	June 2014
Tribological properties of ultrananocrystalline diamond films in various test atmosphere Kumar, N.; Sharma, Neha; Dash, S. Tribology International, Vol. 44, Issue 12 https://doi.org/10.1016/j.triboint.2011.09.003	journal	November 2011
Surface Stability of Epitaxial Elastic Films by the Casimir Force Ya-Pu, Zhao; Li, Wen J. Chinese Physics Letters, Vol. 19, Issue 8 https://doi.org/10.1088/0256-307X/19/8/340	journal	July 2002
Hygroscopic properties of carbon and diesel soot particles Weingartner, E.; Burtscher, H.; Baltensperger, U. Atmospheric Environment, Vol. 31, Issue 15 https://doi.org/10.1016/S1352-2310(97)00023-X	journal	August 1997
Adhesion models: From single to multiple asperity contacts Prokopovich, Polina; Starov, Victor Advances in Colloid and Interface Science, Vol. 168, Issue 1-2 https://doi.org/10.1016/j.cis.2011.03.004	journal	October 2011
Ultrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications Sumant, Anirudha V.; Auciello, Orlando; Carpick, Robert W. MRS Bulletin, Vol. 35, Issue 4 https://doi.org/10.1557/mrs2010.550	journal	April 2010
Hydrogen passivation of electrically active defects in diamond Landstrass, M. I.; Ravi, K. V. Applied Physics Letters, Vol. 55, Issue 14 https://doi.org/10.1063/1.101604	journal	October 1989
Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices Krauss, A. R.; Auciello, O.; Gruen, D. M. Diamond and Related Materials, Vol. 10, Issue 11 https://doi.org/10.1016/S0925-9635(01)00385-5	journal	November 2001
Electrically conducting ultrananocrystalline diamond for the development of a next generation of micro-actuators Buja, Federico; Sumant, Anirudha V.; Kokorian, Jaap Sensors and Actuators A: Physical, Vol. 214 https://doi.org/10.1016/j.sna.2014.04.042	journal	August 2014
Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices Bhushan, Bharat Microelectronic Engineering, Vol. 84, Issue 3 https://doi.org/10.1016/j.mee.2006.10.059	journal	March 2007
Erratum: “Investigation of the effect of hydrogen on electrical and optical properties in chemical-vapor-deposited homoepitaxial diamond films” [J. Appl. Phys. 81 , 744 (1997)] Hayashi, Kazushi; Yamanaka, Sadanori; Watanabe, Hideyuki Journal of Applied Physics, Vol. 81, Issue 10 https://doi.org/10.1063/1.365560	journal	May 1997
A thermal actuator for nanoscale in situ microscopy testing: design and characterization Zhu, Yong; Corigliano, Alberto; Espinosa, Horacio D. Journal of Micromechanics and Microengineering, Vol. 16, Issue 2 https://doi.org/10.1088/0960-1317/16/2/008	journal	January 2006
Hydrophobic diamond films Ostrovskaya, L. Yu.; Ral’chenko, V. G.; Vlasov, I. I. Protection of Metals and Physical Chemistry of Surfaces, Vol. 49, Issue 3 https://doi.org/10.1134/S2070205113030118	journal	May 2013
Scale dependence of micro/nano-friction and adhesion of MEMS/NEMS materials, coatings and lubricants Tambe, Nikhil S.; Bhushan, Bharat Nanotechnology, Vol. 15, Issue 11 https://doi.org/10.1088/0957-4484/15/11/033	journal	October 2004
Critical Review: Adhesion in surface micromechanical structures Maboudian, Roya Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 1 https://doi.org/10.1116/1.589247	journal	January 1997
A ‘nano-battering ram’ for measuring surface forces: obtaining force–distance curves and sidewall stiction data with a MEMS device Spengen, W. Merlijn van; Bakker, Elco; Frenken, Joost W. M. Journal of Micromechanics and Microengineering, Vol. 17, Issue 7 https://doi.org/10.1088/0960-1317/17/7/S05	journal	June 2007
The roles of argon addition in the hot filament chemical vapor deposition system Zhang, Y. F.; Zhang, F.; Gao, Q. J. Diamond and Related Materials, Vol. 10, Issue 8 https://doi.org/10.1016/S0925-9635(01)00383-1	journal	August 2001
The elastic contact of a rough surface Bush, A. W.; Gibson, R. D.; Thomas, T. R. Wear, Vol. 35, Issue 1 https://doi.org/10.1016/0043-1648(75)90145-3	journal	November 1975
The advent of MEMS in space Lafontan, X.; Pressecq, F.; Beaudoin, F. Microelectronics Reliability, Vol. 43, Issue 7 https://doi.org/10.1016/S0026-2714(03)00120-3	journal	July 2003
Adhesion-related failure mechanisms in micromechanical devices Mastrangelo, C. H. Tribology Letters, Vol. 3, Issue 3, p. 223-238 https://doi.org/10.1023/A:1019133222401	journal	September 1997
Ultrananocrystalline Diamond Film as a Wear-Resistant and Protective Coating for Mechanical Seal Applications Sumant, A. V.; Krauss, A. R.; Gruen, D. M. Tribology Transactions, Vol. 48, Issue 1 https://doi.org/10.1080/05698190590893134	journal	January 2005
Silicon carbide as a new MEMS technology Sarro, Pasqualina M. Sensors and Actuators A: Physical, Vol. 82, Issue 1-3 https://doi.org/10.1016/S0924-4247(99)00335-0	journal	May 2000
Deformation and adhesion of elastic bodies in contact Attard, Phil; Parker, John L. Physical Review A, Vol. 46, Issue 12 https://doi.org/10.1103/PhysRevA.46.7959	journal	December 1992
MEMS in medicine and biology Panescu, D. IEEE Engineering in Medicine and Biology Magazine, Vol. 25, Issue 5 https://doi.org/10.1109/MEMB.2006.1705742	journal	September 2006
Toward the Ultimate Tribological Interface: Surface Chemistry and Nanotribology of Ultrananocrystalline Diamond Sumant, A. V.; Grierson, D. S.; Gerbi, J. E. Advanced Materials, Vol. 17, Issue 8, p. 1039-1045 https://doi.org/10.1002/adma.200401264	journal	April 2005
IC-processed electrostatic micromotors Fan, Long-Shen; Tai, Yu-Chong; Muller, Richard S. Sensors and Actuators, Vol. 20, Issue 1-2 https://doi.org/10.1016/0250-6874(89)87100-8	journal	November 1989
Influence of surface passivation on the friction and wear behavior of ultrananocrystalline diamond and tetrahedral amorphous carbon thin films Konicek, A. R.; Grierson, D. S.; Sumant, A. V. Physical Review B, Vol. 85, Issue 15 https://doi.org/10.1103/PhysRevB.85.155448	journal	April 2012
DLC nano-dot surfaces for tribological applications in MEMS devices Singh, R. Arvind; Na, Kyounghwan; Yi, Jin Woo Applied Surface Science, Vol. 257, Issue 8 https://doi.org/10.1016/j.apsusc.2010.10.131	journal	February 2011

Similar Records

Integration of piezoelectric aluminum nitride and ultrananocrystalline diamond films for implantable biomedical microelectromechanical devices

Journal Article · Tue Jan 01 00:00:00 EST 2013 · Applied Physics Letters · OSTI ID:1249848

Zalazar, M.; Gurman, P.; Park, J.; +6 more

Zero-biased and visible-blind UV photodetectors based on nitrogen-doped ultrananocrystalline diamond nanowires

Journal Article · Tue Oct 26 00:00:00 EDT 2021 · Ceramics International · OSTI ID:1249848

Pacheco, Elluz; Zhou, Badi; Aldalbahi, Ali; +2 more

Hydrogenation effects on carrier transport in boron-doped ultrananocrystalline diamond/amorphous carbon films prepared by coaxial arc plasma deposition

Journal Article · Sun Nov 15 00:00:00 EST 2015 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films · OSTI ID:1249848

Katamune, Yūki; Takeichi, Satoshi; Ohmagari, Shinya; +1 more

Title: Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices

Citation Formats

References (31)

Similar Records

Related Subjects