Evolution of crystal structure during the initial stages of ZnO atomic layer deposition

Boichot, R.; Tian, L.; Richard, M. -I.; Crisci, A.; Chaker, A.; Cantelli, V.; Coindeau, S.; Lay, S.; Ouled, T.; Guichet, C.; Fong, D. D.; Blanquet, E.; Deschanvres, J. -L.; Renevier, H.; Chu, M. H.; Aubert, N.; Ciatto, G.; Thomas, O.

doi:10.1021/acs.chemmater.5b04223

Title: Evolution of crystal structure during the initial stages of ZnO atomic layer deposition

Journal Article · Tue Jan 05 00:00:00 EST 2016 · Chemistry of Materials

DOI:https://doi.org/10.1021/acs.chemmater.5b04223· OSTI ID:1248882

Boichot, R. ^[1]; Tian, L. ^[1]; Richard, M. -I. ^[2]; Crisci, A. ^[1]; Chaker, A. ^[1]; Cantelli, V. ^[1]; Coindeau, S. ^[1]; Lay, S. ^[1]; Ouled, T. ^[3]; Guichet, C. ^[3]; Fong, D. D. ^[4]; Blanquet, E. ^[1]; Deschanvres, J. -L. ^[1]; Renevier, H. ^[1]; Chu, M. H. ^[5]; Aubert, N. ^[5]; Ciatto, G. ^[5]; Thomas, O. ^[3]

Univ. of Grenoble Alpes, Grenoble (France)
Aix-Marseille Univ., and CNRS/IN2P3, Marseille (France); European Synchrotron Radiation Facility, Grenoble (France)
Aix-Marseille Univ., and CNRS/IN2P3, Marseille (France)
Argonne National Lab. (ANL), Argonne, IL (United States)
Synchrotron SOLEIL - Beamline SIRIUS, Gif sur Yvette (France)

In this study, a complementary suite of in situ synchrotron X-ray techniques is used to investigate both structural and chemical evolution during ZnO growth by atomic layer deposition. Focusing on the first 10 cycles of growth, we observe that the structure formed during the coalescence stage largely determines the overall microstructure of the film. Furthermore, by comparing ZnO growth on silicon with a native oxide with that on Al₂O₃(001), we find that even with lattice-mismatched substrates and low deposition temperatures, the crystalline texture of the films depend strongly on the nature of the interfacial bonds.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1248882

Journal Information:: Chemistry of Materials, Vol. 28, Issue 2; ISSN 0897-4756

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 26 works

Citation information provided by
Web of Science

References (50)

Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources Ritala, Mikko; Kukli, Kaupo; Raisanen, Petri Science, Vol. 288, Issue 5464, p. 319-321 https://doi.org/10.1126/science.288.5464.319	journal	April 2000
Propane Oxidation over Pt/SrTiO ₃ Nanocuboids Enterkin, James A.; Setthapun, Worajit; Elam, Jeffrey W. ACS Catalysis, Vol. 1, Issue 6 https://doi.org/10.1021/cs200092c	journal	May 2011
ALD for clean energy conversion, utilization, and storage Elam, Jeffrey W.; Dasgupta, Neil P.; Prinz, Fritz B. MRS Bulletin, Vol. 36, Issue 11, p. 899-906 https://doi.org/10.1557/mrs.2011.265	journal	November 2011
Island growth as a growth mode in atomic layer deposition: A phenomenological model Puurunen, Riikka L.; Vandervorst, Wilfried Journal of Applied Physics, Vol. 96, Issue 12 https://doi.org/10.1063/1.1810193	journal	December 2004
Shear mode electromechanical coupling coefficient k15 and crystallites alignment of (112¯0) textured ZnO films Yanagitani, Takahiko; Kiuchi, Masato; Matsukawa, Mami Journal of Applied Physics, Vol. 102, Issue 2 https://doi.org/10.1063/1.2752133	journal	July 2007
Deposition of preferred-orientation ZnO films on the ceramic substrates and its application for surface acoustic wave filters Chu, Sheng-Yuan; Chen, Te-Yi; Water, Walter Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 22, Issue 4 https://doi.org/10.1116/1.1738653	journal	July 2004
Effect of substrate-induced strain on the structural, electrical, and optical properties of polycrystalline ZnO thin films Ghosh, R.; Basak, D.; Fujihara, S. Journal of Applied Physics, Vol. 96, Issue 5 https://doi.org/10.1063/1.1769598	journal	September 2004
Simulation of growth dynamics for nearly epitaxial films Nilsen, Ola; Karlsen, Ole Bjørn; Kjekshus, Arne Journal of Crystal Growth, Vol. 308, Issue 2 https://doi.org/10.1016/j.jcrysgro.2007.08.001	journal	October 2007
In-Situ Studies of ALD Growth of Hafnium Oxide Films Karavaev, Konstantin; Kolanek, Krzysztof; Tallarida, Massimo Advanced Engineering Materials, Vol. 11, Issue 4 https://doi.org/10.1002/adem.200800348	journal	April 2009
Investigation on the Growth Initiation of Ru Thin Films by Atomic Layer Deposition Kim, Seong Keun; Han, Jeong Hwan; Kim, Gun Hwan Chemistry of Materials, Vol. 22, Issue 9 https://doi.org/10.1021/cm100057y	journal	May 2010
In situ synchrotron x-ray characterization of ZnO atomic layer deposition Fong, D. D.; Eastman, J. A.; Kim, S. K. Applied Physics Letters, Vol. 97, Issue 19 https://doi.org/10.1063/1.3514254	journal	November 2010
In-Situ Synchrotron X-Ray Scattering Study of Thin Film Growth by Atomic Layer Deposition Park, Yong Jun; Lee, Dong Ryeol; Lee, Hyun Hwi Journal of Nanoscience and Nanotechnology, Vol. 11, Issue 2 https://doi.org/10.1166/jnn.2011.3399	journal	February 2011
In Situ X-ray Fluorescence Measurements During Atomic Layer Deposition: Nucleation and Growth of TiO ₂ on Planar Substrates and in Nanoporous Films Dendooven, Jolien; Pulinthanathu Sree, Sreeprasanth; De Keyser, Koen The Journal of Physical Chemistry C, Vol. 115, Issue 14 https://doi.org/10.1021/jp111314b	journal	March 2011
Observing the Nucleation Phase of Atomic Layer Deposition In Situ Mack, James F.; Van Stockum, Philip B.; Yemane, Yonas T. Chemistry of Materials, Vol. 24, Issue 22 https://doi.org/10.1021/cm302398v	journal	October 2012
An atomic layer deposition chamber for in situ x-ray diffraction and scattering analysis Geyer, Scott M.; Methaapanon, Rungthiwa; Johnson, Richard W. Review of Scientific Instruments, Vol. 85, Issue 5 https://doi.org/10.1063/1.4876484	journal	May 2014
Structural evolution of platinum thin films grown by atomic layer deposition Geyer, Scott M.; Methaapanon, Rungthiwa; Johnson, Richard Journal of Applied Physics, Vol. 116, Issue 6 https://doi.org/10.1063/1.4892104	journal	August 2014
Nanowire dye-sensitized solar cells Law, Matt; Greene, Lori E.; Johnson, Justin C. Nature Materials, Vol. 4, Issue 6, p. 455-459 https://doi.org/10.1038/nmat1387	journal	May 2005
Predicted electrical properties of modulation-doped ZnO-based transparent conducting oxides Cohen, D. J.; Barnett, S. A. Journal of Applied Physics, Vol. 98, Issue 5 https://doi.org/10.1063/1.2035898	journal	September 2005
Piezoelectric Nanogenerators Based on Zinc Oxide Nanowire Arrays Wang, Z. L. Science, Vol. 312, Issue 5771 https://doi.org/10.1126/science.1124005	journal	April 2006
Atomic layer deposition of ZnO: a review Tynell, Tommi; Karppinen, Maarit Semiconductor Science and Technology, Vol. 29, Issue 4 https://doi.org/10.1088/0268-1242/29/4/043001	journal	February 2014
Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends Miikkulainen, Ville; Leskelä, Markku; Ritala, Mikko Journal of Applied Physics, Vol. 113, Issue 2, Article No. 021301 https://doi.org/10.1063/1.4757907	journal	January 2013
Self-limiting growth of ZnO films on (0001) sapphire substrates by atomic layer deposition at low temperatures using diethyl-zinc and nitrous oxide Lin, Yen-Ting; Chung, Ping-Han; Lai, Hung-Wei Applied Surface Science, Vol. 256, Issue 3 https://doi.org/10.1016/j.apsusc.2009.08.067	journal	November 2009
The surface chemistry of amorphous silica. Zhuravlev model Zhuravlev, L. T. Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 173, Issue 1-3 https://doi.org/10.1016/S0927-7757(00)00556-2	journal	November 2000
Hydroxylated α-Al2O3 (0001) surfaces and metal/α-Al2O3 (0001) interfaces Fu, Qiang; Wagner, Thomas; Rühle, Manfred Surface Science, Vol. 600, Issue 21 https://doi.org/10.1016/j.susc.2006.08.008	journal	November 2006
Coupled microstructural observations and local texture measurements with an automated crystallographic orientation mapping tool attached to a tem Rauch, E. F.; Veron, M. Materialwissenschaft und Werkstofftechnik, Vol. 36, Issue 10, p. 552-556 https://doi.org/10.1002/mawe.200500923	journal	October 2005
Effect of electric field upon the ZnO growth on sapphire (0001) by atomic layer epitaxy method Liu, C. H.; Yan, Min; Liu, Xiang Chemical Physics Letters, Vol. 355, Issue 1-2 https://doi.org/10.1016/S0009-2614(02)00162-8	journal	March 2002
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process Puurunen, Riikka L. Journal of Applied Physics, Vol. 97, Issue 12, Article No. 121301 https://doi.org/10.1063/1.1940727	journal	June 2005
Nucleation and Growth Modes of ALD ZnO Baji, Zsófia; Lábadi, Zoltán; Horváth, Zsolt E. Crystal Growth & Design, Vol. 12, Issue 11 https://doi.org/10.1021/cg301129v	journal	October 2012
The Scherrer Formula for X-Ray Particle Size Determination Patterson, A. L. Physical Review, Vol. 56, Issue 10 https://doi.org/10.1103/PhysRev.56.978	journal	November 1939
Crystallite coalescence: A mechanism for intrinsic tensile stresses in thin films Nix, W. D.; Clemens, B. M. Journal of Materials Research, Vol. 14, Issue 8 https://doi.org/10.1557/JMR.1999.0468	journal	August 1999
Study of oxygen vacancies′ influence on the lattice parameter in ZnO thin film Li, Xinyi; Wang, Yunlan; Liu, Weifeng Materials Letters, Vol. 85 https://doi.org/10.1016/j.matlet.2012.06.107	journal	October 2012
Control of preferred orientation for ZnOx films: control of self-texture Fujimura, Norifumi; Nishihara, Tokihiro; Goto, Seiki Journal of Crystal Growth, Vol. 130, Issue 1-2 https://doi.org/10.1016/0022-0248(93)90861-P	journal	May 1993
Texture development of non-epitaxial polycrystalline ZnO films Kajikawa, Yuya Journal of Crystal Growth, Vol. 289, Issue 1 https://doi.org/10.1016/j.jcrysgro.2005.11.089	journal	March 2006
Uniaxial locked epitaxy of ZnO on the a face of sapphire Fons, P.; Iwata, K.; Yamada, A. Applied Physics Letters, Vol. 77, Issue 12, Article No. 1801 https://doi.org/10.1063/1.1311603	journal	January 2000
Investigation of ZnO/sapphire interface and formation of ZnO nanocrystalline by laser MBE Ohkubo, I.; Matsumoto, Y.; Ohtomo, A. Applied Surface Science, Vol. 159-160 https://doi.org/10.1016/S0169-4332(00)00138-0	journal	June 2000
Growth and characterization of undoped ZnO films for single crystal based device use by radical source molecular beam epitaxy (RS-MBE) Nakahara, K.; Takasu, H.; Fons, P. Journal of Crystal Growth, Vol. 227-228 https://doi.org/10.1016/S0022-0248(01)00929-0	journal	July 2001
Complete Elimination of Multi-angle Rotation Domains in ZnO Epilayers Grown on (0001) Sapphire Substrate Du, X. L.; Murakami, M.; Iwaki, H. physica status solidi (a), Vol. 192, Issue 1 https://doi.org/10.1002/1521-396X(200207)192:1<183::AID-PSSA183>3.0.CO;2-K	journal	July 2002
Effects of Sapphire Substrate Preparation on ZnO Epitaxial Growth by Atmospheric-Pressure Metal Organic Chemical Vapor Deposition Akiyama, Shutetsu; Minegishi, Kazunori; Tanaka, Tooru Japanese Journal of Applied Physics, Vol. 46, Issue 1 https://doi.org/10.1143/JJAP.46.342	journal	January 2007
Structural Characteristics and Annealing Effect of ZnO Epitaxial Films Grown by Atomic Layer Deposition Yang, S.; Lin, B. H.; Liu, W. -R. Crystal Growth & Design, Vol. 9, Issue 12 https://doi.org/10.1021/cg900580r	journal	November 2009
The determination of zinc, copper and iron oxidation state in invasive ductal carcinoma of breast tissue and normal surrounding tissue using XANES Al-Ebraheem, A.; Goettlicher, J.; Geraki, K. X-Ray Spectrometry, Vol. 39, Issue 5 https://doi.org/10.1002/xrs.1272	journal	August 2010
Stability of Polar Oxide Surfaces Wander, A.; Schedin, F.; Steadman, P. Physical Review Letters, Vol. 86, Issue 17 https://doi.org/10.1103/PhysRevLett.86.3811	journal	April 2001
Growth of ZnO thin films—experiment and theory Claeyssens, Frederik; Freeman, Colin L.; Allan, Neil L. J. Mater. Chem., Vol. 15, Issue 1 https://doi.org/10.1039/b414111c	journal	January 2005
Polarity in Oxide Nano-objects Noguera, Claudine; Goniakowski, Jacek Chemical Reviews, Vol. 113, Issue 6 https://doi.org/10.1021/cr3003032	journal	December 2012
Growth Model of MOCVD Polycrystalline ZnO Nicolay, S.; Faÿ, S.; Ballif, C. Crystal Growth & Design, Vol. 9, Issue 11 https://doi.org/10.1021/cg900732h	journal	September 2009
The Chemistry of Water on Alumina Surfaces: Reaction Dynamics from First Principles Hass, K. C. Science, Vol. 282, Issue 5387 https://doi.org/10.1126/science.282.5387.265	journal	October 1998
Theory of the clean and hydrogenated ${Al}_{2} O_{3} (0001) - (1 \times 1)$ surfaces Felice, Rosa Di; Northrup, John E. Physical Review B, Vol. 60, Issue 24 https://doi.org/10.1103/PhysRevB.60.R16287	journal	December 1999
Initial growth mechanism of atomic layer deposition of ZnO on the hydroxylated Si(100)-2×1: A density functional theory study Ren, Jie Applied Surface Science, Vol. 255, Issue 11 https://doi.org/10.1016/j.apsusc.2008.12.077	journal	March 2009
Nanostructures of zinc oxide Wang, Zhong Lin Materials Today, Vol. 7, Issue 6 https://doi.org/10.1016/S1369-7021(04)00286-X	journal	June 2004
Hierarchical ZnO with twinned structure: Morphology evolution, formation mechanism and properties Shi, Ruixia; Song, Xueling; Li, Jia Materials Chemistry and Physics, Vol. 156 https://doi.org/10.1016/j.matchemphys.2015.02.020	journal	April 2015
Calculation of the K-absorption edge and its chemical shift of common metals Kitamura, Michihide; Haydn, Chen Journal of Physics and Chemistry of Solids, Vol. 52, Issue 5 https://doi.org/10.1016/0022-3697(91)90175-y	journal	January 1991

Cited By (6)

Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition Dendooven, Jolien; Solano, Eduardo; Minjauw, Matthias M. Review of Scientific Instruments, Vol. 87, Issue 11 https://doi.org/10.1063/1.4967711	journal	November 2016
The initial stages of ZnO atomic layer deposition on atomically flat In _0.53 Ga _0.47 As substrates Skopin, Evgeniy V.; Rapenne, Laetitia; Roussel, Hervé Nanoscale, Vol. 10, Issue 24 https://doi.org/10.1039/c8nr02440e	journal	January 2018
In Situ Ellipsometry Study of the Early Stage of ZnO Atomic Layer Deposition on In _0.53 Ga _0.47 As Skopin, Evgeniy V.; Deschanvres, Jean-Luc; Renevier, Hubert physica status solidi (a), Vol. 217, Issue 8 https://doi.org/10.1002/pssa.201900831	journal	January 2020
Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies Andersen, Tassie K.; Cook, Seyoung; Benda, Erika Review of Scientific Instruments, Vol. 89, Issue 3 https://doi.org/10.1063/1.5008369	journal	March 2018
Evaluation of Alternative Atomistic Models for the Incipient Growth of ZnO by Atomic Layer Deposition Chu, Manh-Hung; Tian, Liang; Chaker, Ahmad Journal of Electronic Materials, Vol. 46, Issue 6 https://doi.org/10.1007/s11664-017-5448-2	journal	March 2017
FORTE – a multipurpose high-vacuum diffractometer for tender X-ray diffraction and spectroscopy at the SIRIUS beamline of Synchrotron SOLEIL Ciatto, G.; Aubert, N.; Lecroard, M. Journal of Synchrotron Radiation, Vol. 26, Issue 4 https://doi.org/10.1107/s1600577519003722	journal	May 2019

Similar Records

The initial stages of ZnO atomic layer deposition on atomically flat In_0.53Ga_0.47 As substrates

Journal Article · Thu Jun 07 00:00:00 EDT 2018 · Nanoscale · OSTI ID:1248882

Skopin, Evgeniy V.; Rapenne, Laetitia; Roussel, Hervé; +6 more

In situ x-ray studies of the incipient ZnO atomic layer deposition on

{In}_{0.53} {Ga}_{0.47} As

Journal Article · Mon Apr 27 00:00:00 EDT 2020 · Physical Review Materials · OSTI ID:1248882

Skopin, E. V.; Rapenne, L.; Deschanvres, J. L.; +6 more

Evaluation of Alternative Atomistic Models for the Incipient Growth of ZnO by Atomic Layer Deposition

Journal Article · Mon Mar 20 00:00:00 EDT 2017 · Journal of Electronic Materials · OSTI ID:1248882

Chu, Manh-Hung; Tian, Liang; Chaker, Ahmad; +12 more

Related Subjects

36 MATERIALS SCIENCE

Title: Evolution of crystal structure during the initial stages of ZnO atomic layer deposition

Citation Formats

References (50)

Cited By (6)

Similar Records

Related Subjects