Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications

Riha, Shannon C.; Koegel, Alexandra A.; Meng, Xiangbo; Kim, In Soo; Cao, Yanqiang; Pellin, Michael J.; Elam, Jeffrey W.; Martinson, Alex B.  F.

doi:10.1021/acsami.5b11075

Title: Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications

Journal Article · Tue Jan 19 00:00:00 EST 2016 · ACS Applied Materials and Interfaces

DOI:https://doi.org/10.1021/acsami.5b11075· OSTI ID:1248178

Riha, Shannon C. ^[1]; Koegel, Alexandra A. ^[1]; Meng, Xiangbo ^[2]; Kim, In Soo ^[3]; Cao, Yanqiang ^[2]; Pellin, Michael J. ^[3]; Elam, Jeffrey W. ^[2]; Martinson, Alex B. F. ^[3]

Univ. of Wisconsin, Stevens Point, WI (United States). Dept. of Chemistry
Argonne National Lab. (ANL), Argonne, IL (United States). Energy Systems Division
Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division

Manganese sulfide (MnS) thin films were synthesized via atomic layer deposition (ALD) using gaseous manganese bis(ethylcyclopentadienyl) and hydrogen sulfide as precursors. At deposition temperatures ≤150 °C phase-pure r-MnS thin films were deposited, while at temperatures >150 °C, a mixed phase, consisting of both r- and a-MnS resulted. In situ quartz crystal microbalance (QCM) studies validate the self-limiting behavior of both ALD half-reactions and, combined with quadrupole mass spectrometry (QMS) allow the derivation of a self-consistent reaction mechanism. Lastly, MnS thin films were deposited on copper foil and tested as a Li-ion battery anode. The MnS coin cells showed exceptional cycle stability and near-theoretical capacity.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Argonne National Lab. (ANL), Argonne, IL (United States); Energy Frontier Research Centers (EFRC) (United States). Argonne-Northwestern Solar Energy Research Center (ANSER); Energy Frontier Research Centers (EFRC) (United States). Center for Electrical Energy Storage (CEES)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); USDOE Office of Science (SC), Workforce Development for Teachers and Scientists (WDTS)

Grant/Contract Number:: AC02-06CH11357; SC0001059

OSTI ID:: 1248178

Journal Information:: ACS Applied Materials and Interfaces, Vol. 8, Issue 4; ISSN 1944-8244

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 47 works

Citation information provided by
Web of Science

References (30)

Chemical vapor deposition and atomic layer deposition for advanced lithium ion batteries and supercapacitors Wang, Xinran; Yushin, Gleb Energy & Environmental Science, Vol. 8, Issue 7 https://doi.org/10.1039/C5EE01254F	journal	January 2015
ALD for clean energy conversion, utilization, and storage Elam, Jeffrey W.; Dasgupta, Neil P.; Prinz, Fritz B. MRS Bulletin, Vol. 36, Issue 11, p. 899-906 https://doi.org/10.1557/mrs.2011.265	journal	November 2011
Atomic layer deposition in nanostructured photovoltaics: tuning optical, electronic and surface properties Palmstrom, Axel F.; Santra, Pralay K.; Bent, Stacey F. Nanoscale, Vol. 7, Issue 29 https://doi.org/10.1039/C5NR02080H	journal	January 2015
Atomic Layer Deposition Chemistry Recent Developments and Future Challenges Leskelä, Markku; Ritala, Mikko Angewandte Chemie International Edition, Vol. 42, Issue 45, p. 5548-5554 https://doi.org/10.1002/anie.200301652	journal	November 2003
Atomic Layer Deposition: An Overview George, Steven M. Chemical Reviews, Vol. 110, Issue 1, p. 111-131 https://doi.org/10.1021/cr900056b	journal	January 2010
Progress and future directions for atomic layer deposition and ALD-based chemistry Parsons, Gregory N.; George, Steven M.; Knez, Mato MRS Bulletin, Vol. 36, Issue 11 https://doi.org/10.1557/mrs.2011.238	journal	November 2011
Applications of atomic layer deposition to nanofabrication and emerging nanodevices Kim, Hyungjun; Lee, Han-Bo-Ram; Maeng, W.-J. Thin Solid Films, Vol. 517, Issue 8, p. 2563-2580 https://doi.org/10.1016/j.tsf.2008.09.007	journal	February 2009
Nanoengineering and interfacial engineering of photovoltaics by atomic layer deposition Bakke, Jonathan R.; Pickrahn, Katie L.; Brennan, Thomas P. Nanoscale, Vol. 3, Issue 9 https://doi.org/10.1039/c1nr10349k	journal	January 2011
Atomic Layer Deposition of Metal Sulfide Materials Dasgupta, Neil P.; Meng, Xiangbo; Elam, Jeffrey W. Accounts of Chemical Research, Vol. 48, Issue 2, p. 341-348 https://doi.org/10.1021/ar500360d	journal	January 2015
Catalyst Design with Atomic Layer Deposition O’Neill, Brandon J.; Jackson, David H. K.; Lee, Jechan ACS Catalysis, Vol. 5, Issue 3 https://doi.org/10.1021/cs501862h	journal	February 2015
Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends Miikkulainen, Ville; Leskelä, Markku; Ritala, Mikko Journal of Applied Physics, Vol. 113, Issue 2, Article No. 021301 https://doi.org/10.1063/1.4757907	journal	January 2013
Atomically Precise Growth of Catalytically Active Cobalt Sulfide on Flat Surfaces and within a Metal–Organic Framework via Atomic Layer Deposition Peters, Aaron W.; Li, Zhanyong; Farha, Omar K. ACS Nano, Vol. 9, Issue 8 https://doi.org/10.1021/acsnano.5b03429	journal	July 2015
Atomic layer deposition of aluminum sulfide thin films using trimethylaluminum and hydrogen sulfide Sinha, Soumyadeep; Mahuli, Neha; Sarkar, Shaibal K. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 1 https://doi.org/10.1116/1.4903951	journal	January 2015
Aging of electroluminescent ZnS:Mn thin films deposited by atomic layer deposition processes Ihanus, Jarkko; Lankinen, Mikko P.; Kemell, Marianna Journal of Applied Physics, Vol. 98, Issue 11 https://doi.org/10.1063/1.2140892	journal	December 2005
Process and characterisation of chemical bath deposited manganese sulphide (MnS) thin films Lokhande, C. D.; Ennaoui, A.; Patil, P. S. Thin Solid Films, Vol. 330, Issue 2 https://doi.org/10.1016/S0040-6090(98)00500-8	journal	September 1998
Single-Crystal γ-MnS Nanowires Conformally Coated with Carbon Beltran-Huarac, Juan; Resto, Oscar; Carpena-Nuñez, Jennifer ACS Applied Materials & Interfaces, Vol. 6, Issue 2 https://doi.org/10.1021/am404746k	journal	December 2013
Preparation of crystalline MnS thin films by chemical bath deposition Fan, DongBo; Wang, Hao; Zhang, YongCai Materials Chemistry and Physics, Vol. 80, Issue 1 https://doi.org/10.1016/S0254-0584(02)00518-7	journal	April 2003
Morphology controlled synthesis of monodispersed manganese sulfide nanocrystals and their primary application in supercapacitors with high performances Tang, Yongfu; Chen, Teng; Yu, Shengxue Chemical Communications, Vol. 51, Issue 43 https://doi.org/10.1039/C5CC01700A	journal	January 2015
Large-scaled star-shaped α-MnS nanocrystals with novel magnetic properties Tian, Qiwei; Tang, Minghua; Jiang, Feiran Chemical Communications, Vol. 47, Issue 28 https://doi.org/10.1039/c1cc11621e	journal	January 2011
Mineral-Assisted Pathways in Prebiotic Synthesis: Photoelectrochemical Reduction of Carbon(+IV) by Manganese Sulfide Zhang, Xiang V.; Martin, Scot T.; Friend, Cynthia M. Journal of the American Chemical Society, Vol. 126, Issue 36 https://doi.org/10.1021/ja0476415	journal	September 2004
Coral-like α-MnS composites with N-doped carbon as anode materials for high-performance lithium-ion batteries Liu, Yang; Qiao, Yun; Zhang, Wu-Xing Journal of Materials Chemistry, Vol. 22, Issue 45 https://doi.org/10.1039/c2jm35227c	journal	January 2012
Unusual Formation of Single-Crystal Manganese Sulfide Microboxes Co-mediated by the Cubic Crystal Structure and Shape Zhang, Lei; Zhou, Liang; Wu, Hao Bin Angewandte Chemie International Edition, Vol. 51, Issue 29 https://doi.org/10.1002/anie.201202877	journal	June 2012
Hydrothermal synthesis and electrochemical properties of alpha-manganese sulfide submicrocrystals as an attractive electrode material for lithium-ion batteries Zhang, Ning; Yi, Ran; Wang, Zhong Materials Chemistry and Physics, Vol. 111, Issue 1 https://doi.org/10.1016/j.matchemphys.2008.03.040	journal	September 2008
Tunable core-shell single-walled carbon nanotube-Cu2S networked nanocomposites as high-performance cathodes for lithium-ion batteries Meng, Xiangbo; Riha, Shannon C.; Libera, Joseph A. Journal of Power Sources, Vol. 280 https://doi.org/10.1016/j.jpowsour.2015.01.151	journal	April 2015
Design of an atomic layer deposition reactor for hydrogen sulfide compatibility Dasgupta, Neil P.; Mack, James F.; Langston, Michael C. Review of Scientific Instruments, Vol. 81, Issue 4, Article No. 044102 https://doi.org/10.1063/1.3384349	journal	April 2010
Design and implementation of an integral wall-mounted quartz crystal microbalance for atomic layer deposition Riha, Shannon C.; Libera, Joseph A.; Elam, Jeffrey W. Review of Scientific Instruments, Vol. 83, Issue 9 https://doi.org/10.1063/1.4753935	journal	September 2012
Optical and structural properties of manganese sulfide thin films Gümüş, C.; Ulutaş, C.; Ufuktepe, Y. Optical Materials, Vol. 29, Issue 9 https://doi.org/10.1016/j.optmat.2006.04.012	journal	May 2007
Atomic Layer Deposition of Gallium Sulfide Films Using Hexakis(dimethylamido)digallium and Hydrogen Sulfide Meng, Xiangbo; Libera, Joseph A.; Fister, Timothy T. Chemistry of Materials, Vol. 26, Issue 2 https://doi.org/10.1021/cm4031057	journal	December 2013
Atomic layer deposition of ZnS via in situ production of H2S Bakke, J. R.; King, J. S.; Jung, H. J. Thin Solid Films, Vol. 518, Issue 19 https://doi.org/10.1016/j.tsf.2010.03.074	journal	July 2010
Atomic layer deposition of MnO using Bis(ethylcyclopentadienyl)manganese and H2O Burton, B. B.; Fabreguette, F. H.; George, S. M. Thin Solid Films, Vol. 517, Issue 19 https://doi.org/10.1016/j.tsf.2009.02.050	journal	August 2009

Cited By (10)

Study of active sites on Se-MnS/NiS heterojunctions as highly efficient bifunctional electrocatalysts for overall water splitting Zhu, Jie; Sun, Mao; Liu, Shujie Journal of Materials Chemistry A, Vol. 7, Issue 47 https://doi.org/10.1039/c9ta10860b	journal	January 2019
Synthesis of Thin‐Film Metal Pyrites by an Atomic Layer Deposition Approach Wang, Jue; Guo, Zheng; Xiong, Wei Chemistry – A European Journal, Vol. 24, Issue 70 https://doi.org/10.1002/chem.201803327	journal	October 2018
An aminopyridinato Mn( ii ) compound as a novel CVD precursor for manganese-containing films Du, Liyong; Yu, Shaoshan; Liu, Xinfang New Journal of Chemistry, Vol. 42, Issue 6 https://doi.org/10.1039/c8nj00062j	journal	January 2018
Anion-exchange phase control of manganese sulfide for oxygen evolution reaction Pujari, Rahul B.; Gund, Girish S.; Patil, Swati J. Journal of Materials Chemistry A, Vol. 8, Issue 7 https://doi.org/10.1039/c9ta10553k	journal	January 2020
Optical and electrical properties of highly ordered α-, γ- and α + γ-MnS films deposited by reactive sputtering technique Tiwari, Pranjala; Jaiswal, Jyoti; Chandra, Ramesh Journal of Applied Physics, Vol. 126, Issue 21 https://doi.org/10.1063/1.5127004	journal	December 2019
Atomic layer deposition of stable 2D materials Hao, W.; Marichy, C.; Journet, C. 2D Materials, Vol. 6, Issue 1 https://doi.org/10.1088/2053-1583/aad94f	journal	October 2018
Coordination‐Induced Interlinked Covalent‐ and Metal–Organic‐Framework Hybrids for Enhanced Lithium Storage Sun, Weiwei; Tang, Xuxu; Yang, Qinsi Advanced Materials, Vol. 31, Issue 37 https://doi.org/10.1002/adma.201903176	journal	July 2019
2D Transition Metal Dichalcogenide Thin Films Obtained by Chemical Gas Phase Deposition Techniques Park, Gyu-Hyeon; Nielsch, Kornelius; Thomas, Andy Advanced Materials Interfaces, Vol. 6, Issue 3 https://doi.org/10.1002/admi.201800688	journal	October 2018
Hierarchical NiS/N-doped carbon composite hollow spheres with excellent supercapacitor performance Liu, Tao; Jiang, Chuanjia; Cheng, Bei J. Mater. Chem. A, Vol. 5, Issue 40 https://doi.org/10.1039/c7ta06149h	journal	January 2017
Hierarchical NiS/N-doped carbon composite hollow spheres with excellent supercapacitor performance J., Yu,; C., Jiang,; W., You, The University of North Carolina at Chapel Hill University Libraries https://doi.org/10.17615/rb85-3f12	text	January 2017

Similar Records

Template-free vapor-phase growth of patrónite by atomic layer deposition

Journal Article · Thu Mar 09 00:00:00 EST 2017 · Chemistry of Materials · OSTI ID:1248178

Weimer, Matthew S.; McCarthy, Robert F.; Emery, Jonathan D.; +6 more

Formation of Unsaturated Hydrocarbons and Hydrogen: Surface Chemistry of Methyltrioxorhenium(VII) in ALD of Mixed-Metal Oxide Structures Comprising Re(III) Units

Journal Article · Mon Sep 09 00:00:00 EDT 2019 · Chemistry of Materials · OSTI ID:1248178

Gebhard, Maximilian; Letourneau, Steven; Mandia, David J.; +5 more

Low Temperature ABC-Type Ru Atomic Layer Deposition through Consecutive Dissociative Chemisorption, Combustion, and Reduction Steps

Journal Article · Tue Jul 28 00:00:00 EDT 2015 · Chemistry of Materials · OSTI ID:1248178

Lu, Junling; Elam, Jeffrey W.

Related Subjects

36 MATERIALS SCIENCE

Title: Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications

Citation Formats

References (30)

Cited By (10)

Similar Records

Related Subjects