Temperature dependence of the crystalline quality of AlN layer grown on sapphire substrates by metalorganic chemical vapor deposition
Journal Article
·
· Journal of Crystal Growth
- Sponsoring Organization:
- USDOE
- Grant/Contract Number:
- FC26-08NT01580
- OSTI ID:
- 1246419
- Journal Information:
- Journal of Crystal Growth, Journal Name: Journal of Crystal Growth Vol. 414 Journal Issue: C; ISSN 0022-0248
- Publisher:
- ElsevierCopyright Statement
- Country of Publication:
- Netherlands
- Language:
- English
Cited by: 33 works
Citation information provided by
Web of Science
Web of Science
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