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Title: Oriented bottom-up growth of armchair graphene nanoribbons on germanium

Patent ·
OSTI ID:1243035

Graphene nanoribbon arrays, methods of growing graphene nanoribbon arrays and electronic and photonic devices incorporating the graphene nanoribbon arrays are provided. The graphene nanoribbons in the arrays are formed using a scalable, bottom-up, chemical vapor deposition (CVD) technique in which the (001) facet of the germanium is used to orient the graphene nanoribbon crystals along the [110] directions of the germanium.

Research Organization:
Wisconsin Alumni Research Foundation, Madison, WI (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
SC0006414
Assignee:
Wisconsin Alumni Research Foundation (Madison, WI)
Patent Number(s):
9,287,359
Application Number:
14/486,149
OSTI ID:
1243035
Resource Relation:
Patent File Date: 2014 Sep 15
Country of Publication:
United States
Language:
English

References (35)

Graphene grown on Ge(001) from atomic source journal August 2014
Wafer-Scale Growth of Single-Crystal Monolayer Graphene on Reusable Hydrogen-Terminated Germanium journal April 2014
Direct Growth of Graphene Film on Germanium Substrate journal August 2013
Distinctly different thermal decomposition pathways of ultrathin oxide layer on Ge and Si surfaces journal April 2000
Mechanism of photo-stimulated processes in GeOx films journal January 1995
Germanium nanowire field-effect transistors with SiO2 and high-κ HfO2 gate dielectrics journal September 2003
(Invited) Novel Electronic and Optoelectronic Devices in Germanium Integrated on Silicon conference January 2010
High performance germanium MOSFETs journal December 2006
Material potential and scalability challenges of germanium CMOS conference December 2011
High-k/Ge MOSFETs for future nanoelectronics journal January 2008
Germanium MOSFET Devices: Advances in Materials Understanding, Process Development, and Electrical Performance journal May 2008
A sub-400°C germanium MOSFET technology with high-κ dielectric and metal gate conference January 2002
Ambient stability of chemically passivated germanium interfaces journal October 2003
Strained-Germanium Nanostructures for Infrared Photonics journal March 2014
Synthesis, Characterization, and Properties of Large-Area Graphene Films journal January 2009
Nanopatterning of graphene with crystallographic orientation control journal August 2010
Graphene nanoribbons with zigzag and armchair edges prepared by scanning tunneling microscope lithography on gold substrates journal February 2014
Etching and narrowing of graphene from the edges journal June 2010
Graphene-Based Transistor patent-application August 2010
Methods of Preparing a Graphene Sheet patent-application October 2010
Self-Aligned Graphene Transistor patent-application May 2011
Method of Manufacturing Graphene by Using Germanium Layer patent-application October 2011
Graphene Processing for Device and Sensor Applications patent-application January 2012
Transistor Having Graphene Base patent-application March 2012
Graphene Nanoribbons, Method of Fabrication and their Use in Electronic Devices patent-application April 2012
Film on graphene on a substrate and method and devices therefor patent-application June 2012
Semiconductor Structure and Circuit Including Ordered Arrangement of Graphene Nanoribbons, and Methods of Forming Same patent-application July 2012
Structure and Method of Making Graphene Nanoribbons patent-application October 2012
Broadband Absorptive Neutral Density Optical Filter patent-application January 2013
Direct Formation of Graphene on Semiconductor Substrates patent-application April 2013
Homogeneous Multiple Band Gap Devices patent-application April 2013
Nanostructured Graphene with Atomically-Smooth Edges patent-application May 2013
Barrier Guided Growth of Microstructured and Nanostructured Graphene and Graphite patent-application June 2013
Channel-Last Methods for Making FETs patent-application September 2014
Low Voltage Photodetectors patent-application February 2015