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Title: SEM Resolution Improvement Using Semi-Blind Restoration with Hybrid L1-L2 Regularization

Authors:
 [1] ;  [2] ;  [2] ;  [2]
  1. Los Alamos National Laboratory
  2. Colleges of Nanoscale Science and Engineering, State University of New York, Polytechnic Institute
Publication Date:
OSTI Identifier:
1242918
Report Number(s):
LA-UR-16-21811
DOE Contract Number:
AC52-06NA25396
Resource Type:
Conference
Resource Relation:
Conference: 2016 IEEE Southwest Symposium on Image Analysis and Interpretation ; 2016-03-06 - 2016-03-08 ; Santa Fe, New Mexico, United States
Research Org:
Los Alamos National Laboratory (LANL)
Sponsoring Org:
0000
Country of Publication:
United States
Language:
English
Subject:
Mathematics