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Title: Literature Review of Spin On Glass

Spin on glass (SOG) is a promising material that combines the planarization properties of a low-viscosity liquid with a dielectric constant lower than that of silicon dioxide. However, as this paper will show, this material comes with significant processing and material properties challenges that must be understood and overcome. Significant research has been accomplished through a variety of processing techniques that will be reviewed here.
Authors:
 [1]
  1. Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Publication Date:
OSTI Identifier:
1240802
Report Number(s):
LA--UR-16-21332
DOE Contract Number:
AC52-06NA25396
Resource Type:
Technical Report
Research Org:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE Material Science