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Title: Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects

Authors:
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Publication Date:
OSTI Identifier:
1240628
Report Number(s):
LBNL-176705
Journal ID: ISSN 2166-2746; ir:176705
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics; Journal Volume: 33; Journal Issue: 2
Publisher:
American Vacuum Society/AIP
Research Org:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Org:
Materials Sciences Division
Country of Publication:
United States
Language:
English