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Title: Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects

Authors:
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Publication Date:
OSTI Identifier:
1240628
Report Number(s):
LBNL-176705
ir:176705
Resource Type:
Journal Article
Resource Relation:
Journal Volume: 33
Publisher:
J. Vac. Sci. Technol. B
Research Org:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Org:
Materials Sciences Division
Country of Publication:
United States
Language:
English