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Title: Ultrananocrystalline diamond films with optimized dielectric properties for advanced RF MEMS capacitive switches

Authors:
; ;
Publication Date:
OSTI Identifier:
1239661
Report Number(s):
9,269,519
14/731,830
DOE Contract Number:
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Jun 05
Research Org:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS