Development characteristics of polymethyl methacrylate in alcohol/water mixtures: a lithography and Raman spectroscopy study
- Authors:
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1238991
- Grant/Contract Number:
- AC02-06CH11357
- Resource Type:
- Journal Article: Publisher's Accepted Manuscript
- Journal Name:
- Nanotechnology
- Additional Journal Information:
- Journal Volume: 27; Journal Issue: 3; Journal ID: ISSN 0957-4484
- Publisher:
- IOP Publishing
- Country of Publication:
- United Kingdom
- Language:
- English
Citation Formats
Ocola, Leonidas E., Costales, Maya, and Gosztola, David J. Development characteristics of polymethyl methacrylate in alcohol/water mixtures: a lithography and Raman spectroscopy study. United Kingdom: N. p., 2015.
Web. doi:10.1088/0957-4484/27/3/035302.
Ocola, Leonidas E., Costales, Maya, & Gosztola, David J. Development characteristics of polymethyl methacrylate in alcohol/water mixtures: a lithography and Raman spectroscopy study. United Kingdom. https://doi.org/10.1088/0957-4484/27/3/035302
Ocola, Leonidas E., Costales, Maya, and Gosztola, David J. 2015.
"Development characteristics of polymethyl methacrylate in alcohol/water mixtures: a lithography and Raman spectroscopy study". United Kingdom. https://doi.org/10.1088/0957-4484/27/3/035302.
@article{osti_1238991,
title = {Development characteristics of polymethyl methacrylate in alcohol/water mixtures: a lithography and Raman spectroscopy study},
author = {Ocola, Leonidas E. and Costales, Maya and Gosztola, David J.},
abstractNote = {},
doi = {10.1088/0957-4484/27/3/035302},
url = {https://www.osti.gov/biblio/1238991},
journal = {Nanotechnology},
issn = {0957-4484},
number = 3,
volume = 27,
place = {United Kingdom},
year = {Thu Dec 10 00:00:00 EST 2015},
month = {Thu Dec 10 00:00:00 EST 2015}
}
Free Publicly Available Full Text
Publisher's Version of Record at https://doi.org/10.1088/0957-4484/27/3/035302
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Cited by: 12 works
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