Etching mechanisms of graphene nanoribbons in downstream H 2 plasmas: insights from molecular dynamics simulations

Davydova, A.; Despiau-Pujo, E.; Cunge, G.; Graves, D. B.

doi:10.1088/0022-3727/48/19/195202

Title: Etching mechanisms of graphene nanoribbons in downstream H ₂ plasmas: insights from molecular dynamics simulations

Journal Article · Thu Apr 02 00:00:00 EDT 2015 · Journal of Physics. D, Applied Physics

DOI:https://doi.org/10.1088/0022-3727/48/19/195202· OSTI ID:1238884

Davydova, A.; Despiau-Pujo, E.; Cunge, G.; Graves, D. B.

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Sponsoring Organization:: USDOE Office of Science (SC), Fusion Energy Sciences (FES)

OSTI ID:: 1238884

Journal Information:: Journal of Physics. D, Applied Physics, Journal Name: Journal of Physics. D, Applied Physics Vol. 48 Journal Issue: 19; ISSN 0022-3727

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United Kingdom

Language:: English

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Cited by: 17 works

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Title: Etching mechanisms of graphene nanoribbons in downstream H ₂ plasmas: insights from molecular dynamics simulations