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Title: Demonstration of 22-nm half pitch resolution on the SHARP EUV microscope

Authors:
; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1236375
Report Number(s):
LBNL-191081
Journal ID: ISSN 2166-2746; ir:191081
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics; Journal Volume: 33
Publisher:
American Vacuum Society/AIP
Research Org:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Org:
Materials Sciences Division
Country of Publication:
United States
Language:
English