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Title: Optical and mechanical properties of nanocrystalline ZrC thin films grown by pulsed laser deposition.

Thin ZrC films (<500 nm) were grown on (100) Si substrates at a substrate temperature of 500 °C by the pulsed laser deposition (PLD) technique using a KrF excimer laser under different CH 4 pressures. Glancing incidence X-ray diffraction showed that films were nanocrystalline, while X-ray reflectivity studies found out films were very dense and exhibited a smooth surface morphology. Optical spectroscopy data shows that the films have high reflectivity (>90%) in the infrared region, characteristic of metallic behavior. Nanoindentation results indicated that films deposited under lower CH 4 pressures exhibited slightly higher nanohardness and Young modulus values than films deposited under higher pressures. As a result, tribological characterization revealed that these films exhibited relatively high wear resistance and steady-state friction coefficients on the order of μ = 0.4.
 [1] ;  [1] ;  [2] ;  [2] ;  [2] ;  [3] ;  [4] ;  [1] ;  [2]
  1. National Institute for Laser, Plasma, and Radiation Physics, Magurele (Romania)
  2. Univ. of Florida, Gainesville, FL (United States)
  3. Ramapo College of New Jersey, Mahwah, NJ (United States)
  4. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Publication Date:
OSTI Identifier:
Report Number(s):
Journal ID: ISSN 0169-4332; 562238
Grant/Contract Number:
Accepted Manuscript
Journal Name:
Applied Surface Science
Additional Journal Information:
Journal Volume: 352; Journal Issue: C; Journal ID: ISSN 0169-4332
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
unfunded; USDOE
Country of Publication:
United States
77 NANOSCIENCE AND NANOTECHNOLOGY; ZrC; Hard coating; pulsed laser deposition; Infrared optical properties