Evidence for breathing modes in direct current, pulsed, and high power impulse magnetron sputtering plasmas

Yang, Yuchen; Zhou, Xue; Liu, Jason X.; Anders, André

doi:10.1063/1.4939922

Title: Evidence for breathing modes in direct current, pulsed, and high power impulse magnetron sputtering plasmas

Journal Article · Tue Jan 19 00:00:00 EST 2016 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4939922· OSTI ID:1235378

^[1]; Zhou, Xue ^[2]; Liu, Jason X. ^[3];

^[4]

State Key Lab for Materials Processing and Die & Mold Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA, Department of Electrical Engineering, Harbin Institute of Technology, Harbin 150000, China
Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA, Department of Physics, University of California, Berkeley, Berkeley, California 94720, USA
Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA

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Sponsoring Organization:: USDOE

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1235378

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters Vol. 108 Journal Issue: 3; ISSN 0003-6951

Publisher:: American Institute of PhysicsCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 17 works

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References (21)

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Spoke transitions in HiPIMS discharges Hecimovic, A.; Schulz-von der Gathen, V.; Böke, M. Plasma Sources Science and Technology, Vol. 24, Issue 4 https://doi.org/10.1088/0963-0252/24/4/045005	journal	June 2015
Spatial and temporal behavior of the plasma parameters in a pulsed magnetron discharge Gudmundsson, J. T.; Alami, J.; Helmersson, U. Surface and Coatings Technology, Vol. 161, Issue 2-3 https://doi.org/10.1016/S0257-8972(02)00518-2	journal	December 2002
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Faster-than-Bohm Cross- $B$ Electron Transport in Strongly Pulsed Plasmas Brenning, N.; Merlino, R. L.; Lundin, D. Physical Review Letters, Vol. 103, Issue 22 https://doi.org/10.1103/PhysRevLett.103.225003	journal	November 2009
The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering Anders, A.; Čapek, J.; Hála, M. Journal of Physics D: Applied Physics, Vol. 45, Issue 1 https://doi.org/10.1088/0022-3727/45/1/012003	journal	December 2011
Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering Anders, André; Ni, Pavel; Rauch, Albert Journal of Applied Physics, Vol. 111, Issue 5 https://doi.org/10.1063/1.3692978	journal	March 2012
Ion energies in high power impulse magnetron sputtering with and without localized ionization zones Yang, Yuchen; Tanaka, Koichi; Liu, Jason Applied Physics Letters, Vol. 106, Issue 12 https://doi.org/10.1063/1.4916233	journal	March 2015
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