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Title: Microscopic Removal Function and the Relationship Between Slurry Particle Size Distribution and Workpiece Roughness During Pad Polishing

Authors:
 [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [1] ;
  1. Lawrence Livermore National Laboratory, P.O. Box 808 Livermore California 94551
Publication Date:
OSTI Identifier:
1229811
Report Number(s):
LLNL-JRNL-645376
Journal ID: ISSN 0002-7820
DOE Contract Number:
AC52-07NA27344
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of the American Ceramic Society; Journal Volume: 97; Journal Issue: 1
Publisher:
American Ceramic Society
Research Org:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING