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Title: Linking Strain Anisotropy and Plasticity in Copper Metallization

Authors:
; ; ;
Publication Date:
OSTI Identifier:
1229188
Report Number(s):
BNL--111263-2015-JA
Journal ID: ISSN 0003-6951
DOE Contract Number:
SC00112704
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 106
Publisher:
American Institute of Physics (AIP)
Research Org:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
Language:
English