skip to main content

SciTech ConnectSciTech Connect

Title: High-accuracy Aspheric X-ray Mirror Metrology Using Software Configurable Optical Test System/deflectometry

The Software Configurable Optical Test System (SCOTS) uses deflectometry to measure surface slopes of general optical shapes without the need for additional null optics. Careful alignment of test geometry and calibration of inherent system error improve the accuracy of SCOTS to a level where it competes with interferometry. We report a SCOTS surface measurement of an off-axis superpolished elliptical x-ray mirror that achieves <1 nm<1 nm root-mean-square accuracy for the surface measurement with low-order term included.
Authors:
 [1] ;  [1] ;  [1] ;  [2] ;  [2]
  1. Univ. of Arizona, Tucson, AZ (United States)
  2. Brookhaven National Lab. (BNL), Upton, NY (United States)
Publication Date:
OSTI Identifier:
1229107
Report Number(s):
BNL--111182-2015-JA
Journal ID: ISSN 0091-3286
DOE Contract Number:
SC00112704
Resource Type:
Journal Article
Resource Relation:
Journal Name: Optical Engineering; Journal Volume: 54; Journal Issue: 8
Publisher:
SPIE
Research Org:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING