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Title: Atomic Layer Deposition-based Tuning of the Pore Size in Mesoporous Thin Films Studied by In Situ Grazing Incidence Small Angle X-ray Scattering

Authors:
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Publication Date:
OSTI Identifier:
1228928
Report Number(s):
BNL--111003-2015-JA
Journal ID: ISSN 2040-3364
DOE Contract Number:
SC00112704
Resource Type:
Journal Article
Resource Relation:
Journal Name: Nanoscale; Journal Volume: 6; Journal Issue: 24
Publisher:
Royal Society of Chemistry
Research Org:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
Language:
English