Achieving Hard X-ray Nanofocusing Using a Wedged Multilayer Laue Lens

Huang, Xiaojing; Conley, Raymond; Bouet, Nathalie; Zhou, Juan; Macrander, Albert; Maser, Jorg; Yan, Hanfei; Nazaretski, Evgeny; Lauer, Kenneth; Harder, Ross; Robinson, Ian K.; Kalbfleisch, Sebastian; Chu, Yong S.

doi:10.1364/OE.23.012496

Title: Achieving Hard X-ray Nanofocusing Using a Wedged Multilayer Laue Lens

Journal Article · Mon May 04 00:00:00 EDT 2015 · Optics Express

DOI:https://doi.org/10.1364/OE.23.012496· OSTI ID:1228901

Huang, Xiaojing ^[1]; Conley, Raymond ^[2]; Bouet, Nathalie ^[1]; Zhou, Juan ^[1]; Macrander, Albert ^[3]; Maser, Jorg ^[3]; Yan, Hanfei ^[1]; Nazaretski, Evgeny ^[1]; Lauer, Kenneth ^[1]; Harder, Ross ^[3]; Robinson, Ian K. ^[4]; Kalbfleisch, Sebastian ^[1]; Chu, Yong S. ^[1]

Brookhaven National Lab. (BNL), Upton, NY (United States)
Brookhaven National Lab. (BNL), Upton, NY (United States); Argonne National Lab. (ANL), Argonne, IL (United States)
Argonne National Lab. (ANL), Argonne, IL (United States)
Univ. College London, Bloomsbury (United Kingdom); Research Complex at Harwell, Oxfordshire (United Kingdom)

Here, we report on the fabrication and the characterization of a wedged multilayer Laue lens for x-ray nanofocusing. The lens was fabricated using a sputtering deposition technique, in which a specially designed mask was employed to introduce a thickness gradient in the lateral direction of the multilayer. X-ray characterization shows an efficiency of 27% and a focus size of 26 nm at 14.6 keV, in a good agreement with theoretical calculations. Our results indicate that the desired wedging is achieved in the fabricated structure. Furthermore, we anticipate that continuous development on wedged MLLs will advance x-ray nanofocusing optics to new frontiers and enrich capabilities and opportunities for hard X-ray microscopy.

Cite

Export

Save

Research Organization:: Brookhaven National Lab. (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

DOE Contract Number:: SC00112704

OSTI ID:: 1228901

Report Number(s):: BNL-110976-2015-JA

Journal Information:: Optics Express, Vol. 23, Issue 10; ISSN 1094-4087

Publisher:: Optical Society of America (OSA)

Country of Publication:: United States

Language:: English

References (27)

Hard x-ray nanofocusing by multilayer Laue lenses Yan, Hanfei; Conley, Ray; Bouet, Nathalie Journal of Physics D: Applied Physics, Vol. 47, Issue 26 https://doi.org/10.1088/0022-3727/47/26/263001	journal	June 2014
Phase zone plates for x rays and the extreme uv Kirz, Janos Journal of the Optical Society of America, Vol. 64, Issue 3 https://doi.org/10.1364/JOSA.64.000301	journal	January 1974
Hard-X-ray Zone Plates: Recent Progress Wu, Syue-Ren; Hwu, Yeukuang; Margaritondo, Giorgio Materials, Vol. 5, Issue 10 https://doi.org/10.3390/ma5101752	journal	September 2012
Multilayer Laue lenses as high-resolution x-ray optics Maser, Joerg; Stephenson, Gregory B.; Vogt, Stefan Optical Science and Technology, the SPIE 49th Annual Meeting, SPIE Proceedings https://doi.org/10.1117/12.560046	conference	November 2004
Nanometer Linear Focusing of Hard X Rays by a Multilayer Laue Lens Kang, H. C.; Maser, J.; Stephenson, G. B. Physical Review Letters, Vol. 96, Issue 12 https://doi.org/10.1103/PhysRevLett.96.127401	journal	March 2006
Focusing of hard x-rays to 16 nanometers with a multilayer Laue lens Kang, Hyon Chol; Yan, Hanfei; Winarski, Robert P. Applied Physics Letters, Vol. 92, Issue 22 https://doi.org/10.1063/1.2912503	journal	June 2008
Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses Yan, Hanfei; Rose, Volker; Shu, Deming Optics Express, Vol. 19, Issue 16 https://doi.org/10.1364/OE.19.015069	journal	January 2011
11 nm hard X-ray focus from a large-aperture multilayer Laue lens Huang, Xiaojing; Yan, Hanfei; Nazaretski, Evgeny Scientific Reports, Vol. 3, Issue 1 https://doi.org/10.1038/srep03562	journal	December 2013
Depth-graded multilayers for application in transmission geometry as linear zone plates Liu, Chian; Conley, R.; Macrander, A. T. Journal of Applied Physics, Vol. 98, Issue 11 https://doi.org/10.1063/1.2138378	journal	December 2005
Optical Properties of MoSi ₂ /Si Multilayer Laue Lens as Nanometer X-ray Focusing Device Koyama, Takahisa; Ichimaru, Satoshi; Tsuji, Takuya Applied Physics Express, Vol. 1 https://doi.org/10.1143/APEX.1.117003	journal	October 2008
Fabrication of multilayer Laue lenses by a combination of pulsed laser deposition and focused ion beam Liese, Tobias; Radisch, Volker; Krebs, Hans-Ulrich Review of Scientific Instruments, Vol. 81, Issue 7 https://doi.org/10.1063/1.3462985	journal	July 2010
Circular multilayer zone plate for high-energy x-ray nano-imaging Koyama, Takahisa; Takano, Hidekazu; Konishi, Shigeki Review of Scientific Instruments, Vol. 83, Issue 1 https://doi.org/10.1063/1.3676165	journal	January 2012
Sub-5 nm hard x-ray point focusing by a combined Kirkpatrick-Baez mirror and multilayer zone plate Döring, F.; Robisch, A. L.; Eberl, C. Optics Express, Vol. 21, Issue 16 https://doi.org/10.1364/OE.21.019311	journal	January 2013
Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling Mayer, Marcel; Keskinbora, Kahraman; Grévent, Corinne Journal of Synchrotron Radiation, Vol. 20, Issue 3 https://doi.org/10.1107/S0909049513006602	journal	April 2013
Full-field X-ray microscopy with crossed partial multilayer Laue lenses Niese, Sven; Krüger, Peter; Kubec, Adam Optics Express, Vol. 22, Issue 17 https://doi.org/10.1364/OE.22.020008	journal	January 2014
Quantitative x-ray phase imaging at the nanoscale by multilayer Laue lenses Yan, Hanfei; Chu, Yong S.; Maser, Jörg Scientific Reports, Vol. 3, Issue 1 https://doi.org/10.1038/srep01307	journal	February 2013
Oxidation of PtNi nanoparticles studied by a scanning X-ray fluorescence microscope with multi-layer Laue lenses Kang, Hyon Chol; Yan, Hanfei; Chu, Yong S. Nanoscale, Vol. 5, Issue 16 https://doi.org/10.1039/c3nr00396e	journal	January 2013
Takagi-Taupin description of x-ray dynamical diffraction from diffractive optics with large numerical aperture Yan, Hanfei; Maser, Jörg; Macrander, Albert Physical Review B, Vol. 76, Issue 11 https://doi.org/10.1103/PhysRevB.76.115438	journal	September 2007
Wedged multilayer Laue lens Conley, Ray; Liu, Chian; Qian, Jun Review of Scientific Instruments, Vol. 79, Issue 5 https://doi.org/10.1063/1.2924209	journal	May 2008
Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope Nazaretski, E.; Kim, Jungdae; Yan, H. Review of Scientific Instruments, Vol. 84, Issue 3 https://doi.org/10.1063/1.4774387	journal	March 2013
Pushing the limits: an instrument for hard X-ray imaging below 20 nm Nazaretski, E.; Lauer, K.; Yan, H. Journal of Synchrotron Radiation, Vol. 22, Issue 2 https://doi.org/10.1107/S1600577514025715	journal	January 2015
The NSLS-II multilayer Laue lens deposition system Conley, Ray; Bouet, Nathalie; Biancarosa, James SPIE Optical Engineering + Applications, SPIE Proceedings https://doi.org/10.1117/12.842076	conference	August 2009
Characterization of a multilayer Laue lens with imperfections Yan, H.; Kang, H. C.; Maser, J. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 582, Issue 1 https://doi.org/10.1016/j.nima.2007.08.080	journal	November 2007
Design and performance of a scanning ptychography microscope Nazaretski, E.; Huang, X.; Yan, H. Review of Scientific Instruments, Vol. 85, Issue 3 https://doi.org/10.1063/1.4868968	journal	March 2014
Timepix, a 65k programmable pixel readout chip for arrival time, energy and/or photon counting measurements Llopart, X.; Ballabriga, R.; Campbell, M. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 581, Issue 1-2 https://doi.org/10.1016/j.nima.2007.08.079	journal	October 2007
Optimization of overlap uniformness for ptychography Huang, Xiaojing; Yan, Hanfei; Harder, Ross Optics Express, Vol. 22, Issue 10 https://doi.org/10.1364/OE.22.012634	journal	January 2014
High-Resolution Scanning X-ray Diffraction Microscopy Thibault, P.; Dierolf, M.; Menzel, A. Science, Vol. 321, Issue 5887 https://doi.org/10.1126/science.1158573	journal	July 2008

Cited By (12)

3D Nanofabrication of High-Resolution Multilayer Fresnel Zone Plates Sanli, Umut Tunca; Jiao, Chengge; Baluktsian, Margarita Advanced Science, Vol. 5, Issue 9 https://doi.org/10.1002/advs.201800346	journal	June 2018
Nanofocusing of X-ray free-electron laser using wavefront-corrected multilayer focusing mirrors Matsuyama, S.; Inoue, T.; Yamada, J. Scientific Reports, Vol. 8, Issue 1 https://doi.org/10.1038/s41598-018-35611-0	journal	November 2018
Multimodal hard x-ray imaging with resolution approaching 10 nm for studies in material science Yan, Hanfei; Bouet, Nathalie; Zhou, Juan Nano Futures, Vol. 2, Issue 1 https://doi.org/10.1088/2399-1984/aab25d	journal	March 2018
Point focusing with flat and wedged crossed multilayer Laue lenses Kubec, Adam; Melzer, Kathleen; Gluch, Jürgen Journal of Synchrotron Radiation, Vol. 24, Issue 2 https://doi.org/10.1107/s1600577517001722	journal	February 2017
A versatile nanoreactor for complementary in situ X-ray and electron microscopy studies in catalysis and materials science Fam, Yakub; Sheppard, Thomas L.; Becher, Johannes Journal of Synchrotron Radiation, Vol. 26, Issue 5 https://doi.org/10.1107/s160057751900660x	journal	August 2019
Zone Plates for X-Ray Focusing (Review) Lider, V. V. Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, Vol. 11, Issue 6 https://doi.org/10.1134/s1027451017060155	journal	November 2017
Achieving diffraction-limited nanometer-scale X-ray point focus with two crossed multilayer Laue lenses: alignment challenges Yan, Hanfei; Huang, Xiaojing; Bouet, Nathalie Optics Express, Vol. 25, Issue 21 https://doi.org/10.1364/oe.25.025234	journal	January 2017
Multi-slice ptychography with large numerical aperture multilayer Laue lenses Öztürk, Hande; Yan, Hanfei; He, Yan Optica, Vol. 5, Issue 5 https://doi.org/10.1364/optica.5.000601	journal	January 2018
Multilayer Laue lenses at high x-ray energies: Performance and applications Murray, Kevin; Pedersen, Anders F.; Mohacsi, Istvan Deutsches Elektronen-Synchrotron, DESY, Hamburg https://doi.org/10.3204/pubdb-2019-01243	text	January 2019
High-throughput synthesis of modified Fresnel zone plate arrays via ion beam lithography Keskinbora, Kahraman; Sanli, Umut Tunca; Baluktsian, Margarita Beilstein Journal of Nanotechnology, Vol. 9 https://doi.org/10.3762/bjnano.9.194	journal	January 2018
Multilayer Laue lenses at high X-ray energies: performance and applications Murray, Kevin T.; Pedersen, Anders F.; Mohacsi, Istvan Optics Express, Vol. 27, Issue 5 https://doi.org/10.1364/OE.27.007120	journal	January 2019
A versatile nanoreactor for complementary in situ X-ray and electron microscopy studies in catalysis and materials science Fam, Yakub; Sheppard, Thomas L.; Becher, Johannes International Union of Crystallography https://doi.org/10.5445/ir/1000099145	text	January 2019

Similar Records

Achieving hard X-ray nanofocusing using a wedged multilayer Laue lens

Journal Article · Mon May 04 00:00:00 EDT 2015 · Optics Express · OSTI ID:1228901

Huang, Xiaojing; Conley, Raymond; Bouet, Nathalie; +10 more

Achieving hard X-ray nanofocusing using a wedged multilayer Laue lens

Journal Article · Thu Jan 01 00:00:00 EST 2015 · Optics Express · OSTI ID:1228901

Huang, Xiaojing; Conley, Raymond; Bouet, Nathalie; +10 more

2D MEMS-based multilayer Laue lens nanofocusing optics for high-resolution hard x-ray microscopy

Journal Article · Thu May 28 00:00:00 EDT 2020 · Optics Express · OSTI ID:1228901

Xu, Wei; Xu, Weihe; Bouet, Nathalie; +9 more

Related Subjects

42 ENGINEERING

Title: Achieving Hard X-ray Nanofocusing Using a Wedged Multilayer Laue Lens

Citation Formats

References (27)

Cited By (12)

Similar Records

Related Subjects