Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas

Zhang, Yiting; Zafar, Abdullah; Coumou, David J.; Shannon, Steven C.; Kushner, Mark J.

doi:10.1063/1.4922631

Title: Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas

Journal Article · Wed Jun 17 00:00:00 EDT 2015 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4922631· OSTI ID:1228183

^[1]; Zafar, Abdullah ^[2];

^[3]; Shannon, Steven C. ^[2]; Kushner, Mark J. ^[1]

Department of Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Ave, Ann Arbor, Michigan 48109, USA
Nuclear Engineering Department, North Carolina State University, 2500 Stinson Drive, Raleigh, North Carolina 27695, USA
MKS Instruments, Inc. 100 Highpower Road, Rochester, New York 14623, USA

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Sponsoring Organization:: USDOE

Grant/Contract Number:: SC0001319

OSTI ID:: 1228183

Journal Information:: Journal of Applied Physics, Journal Name: Journal of Applied Physics Vol. 117 Journal Issue: 23; ISSN 0021-8979

Publisher:: American Institute of PhysicsCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 49 works

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References (39)

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