skip to main content

SciTech ConnectSciTech Connect

Title: Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas

Authors:
; ; ; ;
Publication Date:
OSTI Identifier:
1228183
Grant/Contract Number:
SC0001319
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 117; Journal Issue: 23; Related Information: CHORUS Timestamp: 2016-12-22 04:17:13; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English