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Title: First Principle Simulation of Diffraction based Metrology Techniques

This report is a summary of the work performed by SNL in regards to light diffraction techniques.
Authors:
 [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [2]
  1. Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
  2. Company X, Albuquerque, NM (United States)
Publication Date:
OSTI Identifier:
1227984
Report Number(s):
SAND2015--8794R
614709
DOE Contract Number:
AC04-94AL85000
Resource Type:
Technical Report
Research Org:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS