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Title: On the origins of hardness of Cu–TiN nanolayered composites

We investigated the mechanical response of physical vapor deposited Cu–TiN nanolayered composites of varying layer thicknesses from 5 nm to 200 nm. Both the Cu and TiN layers were found to consist of single phase nanometer sized grains. The grain sizes in the Cu and TiN layers, measured using transmission electron microscopy and X-ray diffraction, were found to be comparable to or smaller than their respective layer thicknesses. Indentation hardness testing revealed that the hardness of such nanolayered composites exhibits a weak dependence on the layer thickness but is more correlated to their grain size.
 [1] ;  [1] ;  [2] ;  [1] ;  [1] ;  [1] ;  [3] ;  [1] ;  [1]
  1. Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
  2. Swiss Federal Labs for Materials Science and Technology, Thun (Switzerland)
  3. Univ. of Michigan, Ann Arbor, MI (United States)
Publication Date:
OSTI Identifier:
Report Number(s):
Journal ID: ISSN 1359-6462; PII: S1359646215002985
Grant/Contract Number:
Accepted Manuscript
Journal Name:
Scripta Materialia
Additional Journal Information:
Journal Volume: 109; Journal Issue: C; Journal ID: ISSN 1359-6462
Research Org:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY; multilayers; hardness; grain size; layer thickness