skip to main content

Title: Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering

Authors:
ORCiD logo
Publication Date:
OSTI Identifier:
1226614
Grant/Contract Number:
AC02-05CH11231
Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 105; Journal Issue: 24; Related Information: CHORUS Timestamp: 2017-06-22 22:12:08; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English