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Title: Atomic layer deposition of Al-incorporated Zn(O,S) thin films with tunable electrical properties

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4901899· OSTI ID:1224302
 [1]; ORCiD logo [1];  [1];  [1];  [1]; ORCiD logo [2];  [2];  [3];  [2];  [1]
  1. Harvard University, Cambridge, Massachusetts 02138, USA
  2. IBM T. J. Watson Research Center, Yorktown Heights, New York 10598, USA
  3. IBM T. J. Watson Research Center, Yorktown Heights, New York 10598, USA, Duke University, Durham, North Carolina 27708, USA

Sponsoring Organization:
USDOE
OSTI ID:
1224302
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Vol. 105 Journal Issue: 20; ISSN 0003-6951
Publisher:
American Institute of PhysicsCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 15 works
Citation information provided by
Web of Science

References (21)

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Thin film solar cell with 8.4% power conversion efficiency using an earth-abundant Cu 2 ZnSnS 4 absorber : Cu journal November 2011
Optical and electronic properties of post-annealed ZnO:Al thin films journal April 2010
Atomic layer deposition of Zn(O,S) thin films with tunable electrical properties by oxygen annealing journal April 2013
Theoretical analysis of the effect of conduction band offset of window/CIS layers on performance of CIS solar cells using device simulation journal March 2001
Device Characteristics of CZTSSe Thin-Film Solar Cells with 12.6% Efficiency journal November 2013
Anomalous Optical Absorption Limit in InSb journal February 1954
SnS thin-films by RF sputtering at room temperature journal August 2011
Overcoming Efficiency Limitations of SnS-Based Solar Cells journal June 2014
Enhancing the efficiency of SnS solar cells via band-offset engineering with a zinc oxysulfide buffer layer journal February 2013
Band alignment of SnS/Zn(O,S) heterojunctions in SnS thin film solar cells journal October 2013
Quantitative analyses of damp-heat-induced degradation in transparent conducting oxides journal March 2014
Cd-free buffer layer materials on Cu 2 ZnSn(S x Se 1−x ) 4 : Band alignments with ZnO, ZnS, and In 2 S 3 journal May 2012
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  • Repins, Ingrid; Contreras, Miguel A.; Egaas, Brian
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journal May 2008
Co-optimization of SnS absorber and Zn(O,S) buffer materials for improved solar cells: SnS absorber and Zn(O,S) buffer materials for improved solar cells journal May 2014
3.88% Efficient Tin Sulfide Solar Cells using Congruent Thermal Evaporation journal August 2014
Microstructural characterization of high-efficiency Cu(In,Ga)Se2 solar cells journal December 1997
Growth characteristics, material properties, and optical properties of zinc oxysulfide films deposited by atomic layer deposition
  • Bakke, Jonathan R.; Tanskanen, Jukka T.; Hägglund, Carl
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 1 https://doi.org/10.1116/1.3664758
journal January 2012
Absorption edge and internal electric fields in amorphous semiconductors journal August 1970
An atomic layer deposition reactor with dose quantification for precursor adsorption and reactivity studies journal January 2013