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Title: Atomic layer deposition of Al-incorporated Zn(O,S) thin films with tunable electrical properties

Authors:
; ORCiD logo ; ; ; ; ORCiD logo ; ; ; ;
Publication Date:
OSTI Identifier:
1224302
Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 105; Journal Issue: 20; Related Information: CHORUS Timestamp: 2016-12-29 13:43:28; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English