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Title: Facile electron-beam lithography technique for irregular and fragile substrates

Authors:
; ;
Publication Date:
OSTI Identifier:
1224258
Grant/Contract Number:
AC02-05CH11231
Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 105; Journal Issue: 17; Related Information: CHORUS Timestamp: 2016-12-29 13:44:07; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English