skip to main content

SciTech ConnectSciTech Connect

Title: Tunable cavity resonator including a plurality of MEMS beams

A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.
Authors:
; ; ; ; ;
Publication Date:
OSTI Identifier:
1223688
Report Number(s):
9,166,271
13/908,201
DOE Contract Number:
FC52-08NA28617
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Jun 03
Research Org:
Purdue Research Foundation, West Lafayette, IN (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS