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This content will become publicly available on October 14, 2015

Title: Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices

Authors:
; ; ; ; ;
Publication Date:
OSTI Identifier:
1223555
Grant/Contract Number:
CBET-1048616
Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 105; Journal Issue: 15; Related Information: CHORUS Timestamp: 2016-12-29 12:36:14; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English