In situ optical diagnostic for monitoring or control of sodium diffusion in photovoltaics manufacturing
A method of fabricating a photovoltaic device 100, includes the steps of providing a glass substrate 102, depositing a molybdenum layer 104 on a surface of the glass substrate, directing light through the glass substrate to the near-substrate region of the molybdenum layer 206, detecting an optical property of the near-substrate region of the molybdenum layer after interaction with the incident light 208 and determining a density of the near-substrate region of the molybdenum layer from the detected optical property 210. A molybdenum deposition parameter may be controlled based upon the determined density of the near-substrate region of the molybdenum layer 218. A non-contact method measures a density of the near-substrate region of a molybdenum layer and a deposition chamber 300.
- Research Organization:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC36-08GO28308
- Assignee:
- Alliance For Sustainable Energy, LLC (Golden, CO)
- Patent Number(s):
- 9,136,184
- Application Number:
- 14/112,033
- OSTI ID:
- 1214585
- Resource Relation:
- Patent File Date: 2012 Feb 17
- Country of Publication:
- United States
- Language:
- English
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