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Title: Maskless Lithography of Nanometer-Scale Circuit Structures in Supported, Single-Layer Graphene Using Helium Ion Microscopy

Authors:
 [1] ;  [1] ;  [1] ;  [1] ;  [1]
  1. ORNL
Publication Date:
OSTI Identifier:
1214498
DOE Contract Number:
DE-AC05-00OR22725
Resource Type:
Conference
Resource Relation:
Conference: TechConnect Nanotechnology, Washington, DC, USA, 20150615, 20150615
Research Org:
Oak Ridge National Laboratory (ORNL); Center for Nanophase Materials Sciences (CNMS)
Sponsoring Org:
SC USDOE - Office of Science (SC)
Country of Publication:
United States
Language:
English