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Title: Ion polished Cr/Sc attosecond multilayer mirrors for high water window reflectivity

Journal Article · · Optics Express
DOI:https://doi.org/10.1364/OE.22.026526· OSTI ID:1213052
 [1];  [1];  [1];  [1];  [2];  [3];  [4];  [5];  [5];  [2];  [1]
  1. Ludwig-Maximilians-Univ. Munchen, Garching (Germany); Max-Planck-Institut fur Quantenoptik, Garching (Germany)
  2. Ludwig-Maximilians-Univ. Munchen, Munchen (Germany); Max-Planck-Institut fur Eisenforschung GmbH, Dusseldorf (Germany)
  3. Ludwig-Maximilians-Univ. Munchen, Munchen (Germany)
  4. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
  5. Ludwig-Maximilians-Univ. Munchen, Garching (Germany); Ludwig, Maximilians-Univ. Munchen, Munchen (Germany)
+ Show Author Affiliations

Recent advances in the development of attosecond soft X-ray sources ranging into the water window spectral range, between the 1s states of carbon and oxygen (284 eV–543 eV), are also driving the development of suited broadband multilayer optics for steering and shaping attosecond pulses. The relatively low intensity of current High Harmonic Generation (HHG) soft X-ray sources calls for an efficient use of photons, thus the development of low-loss multilayer optics is of uttermost importance. Here, we report about the realization of broadband Cr/Sc attosecond multilayer mirrors with nearly atomically smooth interfaces by an optimized ion beam deposition and assisted interface polishing process. This yields to our knowledge highest multilayer mirror reflectivity at 300 eV near normal incidence. The results are verified by transmission electron microscopy (TEM) and soft/hard X-ray reflectometry.

Research Organization:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE
Grant/Contract Number:
AC02-05CH11231
OSTI ID:
1213052
Journal Information:
Optics Express, Vol. 22, Issue 22; ISSN 1094-4087
Publisher:
Optical Society of America (OSA)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 18 works
Citation information provided by
Web of Science

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Cited By (2)

Low-energy ion polishing of Si in W/Si soft X-ray multilayer structures journal July 2019
Attosecond Pulse Shaping by Multilayer Mirrors journal December 2018

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Related Subjects

36 MATERIALS SCIENCE
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
multilayers
x-rays
soft x-rays
extreme ultraviolet (EUV)
roughness
mirrors
deposition and fabrication
ultrafast optics