Study of V and Y Shape Frank-Type Stacking Faults Formation in 4H-SiC Epilayer
Journal Article
·
· Materials Science Forum (Online)
- Dow
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- OSTI ID:
- 1212219
- Journal Information:
- Materials Science Forum (Online), Vol. 778; ISSN 1662-9752
- Country of Publication:
- United States
- Language:
- ENGLISH
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