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Title: Electron heating in low pressure capacitive discharges revisited

Journal Article · · PHYSICS OF PLASMAS
DOI:https://doi.org/10.1063/1.4903542· OSTI ID:1211764

Sponsoring Organization:
USDOE Office of Science (SC), Fusion Energy Sciences (FES)
OSTI ID:
1211764
Journal Information:
PHYSICS OF PLASMAS, Vol. 21, Issue 12; ISSN 1070-664X: PHPAEN
Country of Publication:
United States
Language:
English

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