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Title: Numerical Modeling of an RF Argon–Silane Plasma with Dust Particle Nucleation and Growth

Authors:
;
Publication Date:
OSTI Identifier:
1211648
Resource Type:
Journal Article
Resource Relation:
Journal Name: Plasma Chemistry and Plasma Processing; Journal Volume: 34; Journal Issue: 3
Sponsoring Org:
USDOE Office of Science (SC), Fusion Energy Sciences (FES)
Country of Publication:
United States
Language:
English