Order within disorder: The atomic structure of ion-beam sputtered amorphous tantala (a-Ta₂O₅)
Amorphous tantala (a-Ta₂O₅) is a technologically important material often used in high-performance coatings. Understanding this material at the atomic level provides a way to further improve performance. This work details extended X-ray absorption fine structure measurements of a-Ta₂O₅ coatings, where high-quality experimental data and theoretical fits have allowed a detailed interpretation of the nearest-neighbor distributions. It was found that the tantalum atom is surrounded by four shells of atoms in sequence; oxygen, tantalum, oxygen, and tantalum. A discussion is also included on how these models can be interpreted within the context of published crystalline Ta₂O₅ and other a-T₂O₅ studies.
- Stanford Univ., CA (United States). E.L. Ginzton Lab.
- California Inst. of Technology (CalTech), Pasadena, CA (United States). LIGO Lab.
- Stanford Univ., Stanford, CA (United States). Dept. of Geological and Environmental Sciences
- SLAC National Accelerator Lab., Menlo Park, CA (United States). Stanford Synchrotron Radiation Lightsource (SSRL)
- SLAC National Accelerator Lab., Menlo Park, CA (United States)
- Univ. of Glasgow (United Kingdom), School of Physics and Astronomy, SUPA
- Publication Date:
- OSTI Identifier:
- Grant/Contract Number:
- Accepted Manuscript
- Journal Name:
- APL Materials
- Additional Journal Information:
- Journal Volume: 3; Journal Issue: 3; Journal ID: ISSN 2166-532X
- American Institute of Physics (AIP)
- Research Org:
- SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)
- Sponsoring Org:
- Country of Publication:
- United States
- 36 MATERIALS SCIENCE extended x-ray absorption fine structure spectroscopy; tantalum; crystal structure; shell model; materials properties
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