U.S. Department of EnergyOffice of Scientific and Technical Information
System and method for 2D workpiece alignment
Abstract
A carrier capable of holding one or more workpieces is disclosed. The carrier includes movable projections located along the sides of each cell in the carrier. This carrier, in conjunction with a separate alignment apparatus, aligns each workpiece within its respective cell against several alignment pins, using a multiple step alignment process to guarantee proper positioning of the workpiece in the cell. First, the workpieces are moved toward one side of the cell. Once the workpieces have been aligned against this side, the workpieces are then moved toward an adjacent orthogonal side such that the workpieces are aligned to two sides of the cell. Once aligned, the workpiece is held in place by the projections located along each side of each cell. In addition, the alignment pins are also used to align the associated mask, thereby guaranteeing that the mask is properly aligned to the workpiece.
- Inventors:
- Publication Date:
- Research Org.:
- Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1193299
- Patent Number(s):
- 9,082,799
- Application Number:
- 13/623,428
- Assignee:
- Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
- DOE Contract Number:
- EE0004737
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2012 Sep 20
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Weaver, William T., Carlson, Charles T., Smith, Scott A., Beck, Michael A., Webb, Aaron P., Strassner, James D., Gravell, Lawrence R., and Simmons, Michael C. System and method for 2D workpiece alignment. United States: N. p., 2015.
Web.
Weaver, William T., Carlson, Charles T., Smith, Scott A., Beck, Michael A., Webb, Aaron P., Strassner, James D., Gravell, Lawrence R., & Simmons, Michael C. System and method for 2D workpiece alignment. United States.
Weaver, William T., Carlson, Charles T., Smith, Scott A., Beck, Michael A., Webb, Aaron P., Strassner, James D., Gravell, Lawrence R., and Simmons, Michael C. 2015.
"System and method for 2D workpiece alignment". United States. https://www.osti.gov/servlets/purl/1193299.
@article{osti_1193299,
title = {System and method for 2D workpiece alignment},
author = {Weaver, William T. and Carlson, Charles T. and Smith, Scott A. and Beck, Michael A. and Webb, Aaron P. and Strassner, James D. and Gravell, Lawrence R. and Simmons, Michael C.},
abstractNote = {A carrier capable of holding one or more workpieces is disclosed. The carrier includes movable projections located along the sides of each cell in the carrier. This carrier, in conjunction with a separate alignment apparatus, aligns each workpiece within its respective cell against several alignment pins, using a multiple step alignment process to guarantee proper positioning of the workpiece in the cell. First, the workpieces are moved toward one side of the cell. Once the workpieces have been aligned against this side, the workpieces are then moved toward an adjacent orthogonal side such that the workpieces are aligned to two sides of the cell. Once aligned, the workpiece is held in place by the projections located along each side of each cell. In addition, the alignment pins are also used to align the associated mask, thereby guaranteeing that the mask is properly aligned to the workpiece.},
doi = {},
url = {https://www.osti.gov/biblio/1193299},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 14 00:00:00 EDT 2015},
month = {Tue Jul 14 00:00:00 EDT 2015}
}
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Works referencing / citing this record:
System and method for 2D workpiece alignment
patent, July 2015
- Weaver, William T.; Carlson, Charles T.; Smith, Scott A.
- US Patent Document 9,082,799