System and method for 2D workpiece alignment
A carrier capable of holding one or more workpieces is disclosed. The carrier includes movable projections located along the sides of each cell in the carrier. This carrier, in conjunction with a separate alignment apparatus, aligns each workpiece within its respective cell against several alignment pins, using a multiple step alignment process to guarantee proper positioning of the workpiece in the cell. First, the workpieces are moved toward one side of the cell. Once the workpieces have been aligned against this side, the workpieces are then moved toward an adjacent orthogonal side such that the workpieces are aligned to two sides of the cell. Once aligned, the workpiece is held in place by the projections located along each side of each cell. In addition, the alignment pins are also used to align the associated mask, thereby guaranteeing that the mask is properly aligned to the workpiece.
- Research Organization:
- Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- EE0004737
- Assignee:
- Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
- Patent Number(s):
- 9,082,799
- Application Number:
- 13/623,428
- OSTI ID:
- 1193299
- Resource Relation:
- Patent File Date: 2012 Sep 20
- Country of Publication:
- United States
- Language:
- English
System and method for 2D workpiece alignment
|
patent | July 2015 |
Similar Records
Multi-part mask for implanting workpieces
Mechanical alignment of substrates to a mask