skip to main content

SciTech ConnectSciTech Connect

Title: Integrated avalanche photodiode arrays

The present disclosure includes devices for detecting photons, including avalanche photon detectors, arrays of such detectors, and circuits including such arrays. In some aspects, the detectors and arrays include a virtual beveled edge mesa structure surrounded by resistive material damaged by ion implantation and having side wall profiles that taper inwardly towards the top of the mesa structures, or towards the direction from which the ion implantation occurred. Other aspects are directed to masking and multiple implantation and/or annealing steps. Furthermore, methods for fabricating and using such devices, circuits and arrays are disclosed.
Authors:
Publication Date:
OSTI Identifier:
1190911
Report Number(s):
9,076,707
14/257,179
DOE Contract Number:
SC0009538
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 Apr 21
Research Org:
LightSpin Technologies, Inc., Endicott, NY (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE