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Title: Determination of the Internal Morphology of Nanostructures Patterned by Directed Self Assembly

Authors:
; ; ; ; ; ; ; ;  [1] ;  [2]
  1. IBM
  2. (
Publication Date:
OSTI Identifier:
1186899
Resource Type:
Journal Article
Resource Relation:
Journal Name: ACS Nano; Journal Volume: 8; Journal Issue: (8) ; 08, 2014
Publisher:
American Chemical Society
Research Org:
Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
Sponsoring Org:
INDUSTRY
Country of Publication:
United States
Language:
ENGLISH