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Title: Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition

Journal Article · · Beilstein Journal of Nanotechnology
DOI:https://doi.org/10.3762/bjnano.6.94· OSTI ID:1185887
 [1];  [1];  [2];  [3];  [4];  [2]
  1. Univ. of Tennessee, Knoxville, TN (United States). Materials Science and Engineering Dept.
  2. Univ. of Tennessee, Knoxville, TN (United States). Materials Science and Engineering Dept.; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Nanofabrication Research Lab., Center for Nanophase Materials Sciences
  3. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Nanofabrication Research Lab., Center for Nanophase Materials Sciences
  4. Graz Univ. of Technology, Steyrergasse (Austria). Inst. for Electron Microscopy and Nanoanalysis
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In this paper, platinum–carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature. Time-dependent studies demonstrate that the process occurs from the top–down. Electron beam energy and current studies demonstrate that the process is controlled by a confluence of the electron energy loss and oxygen concentration. Furthermore, the experimental results are modeled as a 2nd order reaction which is dependent on both the electron energy loss density and the oxygen concentration. Finally, in addition to purification, the post-deposition electron stimulated oxygen purification process enhances the resolution of the EBID process due to the isotropic carbon removal from the as-deposited materials which produces high-fidelity shape retention.

Research Organization:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
Sponsoring Organization:
USDOE Office of Science (SC)
Grant/Contract Number:
AC05-00OR22725
OSTI ID:
1185887
Journal Information:
Beilstein Journal of Nanotechnology, Vol. 6; ISSN 2190-4286
Publisher:
Beilstein InstituteCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 23 works
Citation information provided by
Web of Science

References (26)

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Cited By (5)

Additive Manufacturing of Metal Structures at the Micrometer Scale journal January 2017
Plasma-digital nexus: plasma nanotechnology for the digital manufacturing age journal January 2020
Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review journal December 2019
Electron interactions with the heteronuclear carbonyl precursor H 2 FeRu 3 (CO) 13 and comparison with HFeCo 3 (CO) 12 : from fundamental gas phase and surface science studies to focused electron beam induced deposition journal January 2018
Dynamics and fragmentation mechanism of (C 5 H 4 CH 3 )Pt(CH 3 ) 3 on SiO 2 surfaces journal January 2018

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