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Title: Method of monitoring photoactive organic molecules in-situ during gas-phase deposition of the photoactive organic molecules

A method for in-situ monitoring of gas-phase photoactive organic molecules in real time while depositing a film of the photoactive organic molecules on a substrate in a processing chamber for depositing the film includes irradiating the gas-phase photoactive organic molecules in the processing chamber with a radiation from a radiation source in-situ while depositing the film of the one or more organic materials and measuring the intensity of the resulting photoluminescence emission from the organic material. One or more processing parameters associated with the deposition process can be determined from the photoluminescence intensity data in real time providing useful feedback on the deposition process.
Authors:
; ;
Publication Date:
OSTI Identifier:
1185298
Report Number(s):
9,062,368
13/652,593
DOE Contract Number:
SC0005310
Resource Type:
Patent
Resource Relation:
Patent File Date: 2012 Oct 16
Research Org:
The Regents of the University of Michigan, Ann Arbor, MI (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 14 SOLAR ENERGY; 47 OTHER INSTRUMENTATION