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Title: SIDEWALL ROUGHNESS EFFECTS ON SOI MEMS FRACTURE STRENGTH.

Abstract not provided.
Authors:
;
Publication Date:
OSTI Identifier:
1184465
Report Number(s):
SAND2014-18365J
537922
DOE Contract Number:
AC04-94AL85000
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Micromechanical Systems
Research Org:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
Language:
English