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Title: Method of producing nanopatterned articles, and articles produced thereby

A nanopatterned surface is prepared by forming a block copolymer film on a miscut crystalline substrate, annealing the block copolymer film, then reconstructing the surface of the annealed block copolymer film The method creates a well-ordered array of voids in the block copolymer film that is maintained over a large area. The nanopatterned block copolymer films can be used in a variety of different applications, including the fabrication of high density data storage media.
Authors:
; ;
Publication Date:
OSTI Identifier:
1178670
Report Number(s):
9,018,649
14/048,073
DOE Contract Number:
FG02-96ER45612
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Oct 08
Research Org:
University of Massachusetts, Boston, MA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 77 NANOSCIENCE AND NANOTECHNOLOGY