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Title: A High-Precision Instrument for Mapping of Rotational Errors in Rotary Stages

Journal Article · · Journal of Synchrotron Radiation (Online)
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A rotational stage is a key component of every X-ray instrument capable of providing tomographic or diffraction measurements. To perform accurate three-dimensional reconstructions, runout errors due to imperfect rotation (e.g. circle of confusion) must be quantified and corrected. A dedicated instrument capable of full characterization and circle of confusion mapping in rotary stages down to the sub-10 nm level has been developed. A high-stability design, with an array of five capacitive sensors, allows simultaneous measurements of wobble, radial and axial displacements. The developed instrument has been used for characterization of two mechanical stages which are part of an X-ray microscope.

Research Organization:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
Grant/Contract Number:
SC00112704
OSTI ID:
1174100
Report Number(s):
BNL-107387-2015-JA; R&D Project: LS001
Journal Information:
Journal of Synchrotron Radiation (Online), Vol. 21, Issue 6; ISSN 1600-5775
Publisher:
International Union of CrystallographyCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 11 works
Citation information provided by
Web of Science

References (11)

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X-ray ptychographic computed tomography at 16 nm isotropic 3D resolution journal January 2014
An instrument for 3D x-ray nano-imaging journal July 2012
Nanoscale Hard X-Ray Microscopy Methods for Materials Studies journal July 2013
Compact prototype apparatus for reducing the circle of confusion down to 40 nm for x-ray nanotomography journal March 2013
The Race to X-ray Microbeam and Nanobeam Science journal December 2011
Oxidation of PtNi nanoparticles studied by a scanning X-ray fluorescence microscope with multi-layer Laue lenses journal January 2013
Transmission and emission x-ray microscopy: operation modes, contrast mechanisms and applications journal February 2011
Sphere of confusion of a goniometer: measurements, techniques and results journal October 2010
Nanoresolution radiology of neurons journal May 2012
Hard x-ray nanofocusing by multilayer Laue lenses journal June 2014

Cited By (4)

A rotational and axial motion system load frame insert for in situ high energy x-ray studies journal September 2015
Design, characterization, and performance of a hard x-ray transmission microscope at the National Synchrotron Light Source II 18-ID beamline journal May 2019
High-speed raster-scanning synchrotron serial microcrystallography with a high-precision piezo-scanner text January 2018
A rotational and axial motion system load frame insert for in situ high energy x-ray studies text January 2015

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Related Subjects

36 MATERIALS SCIENCE
high-precision instrument
rotational errors
rotary stages