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Title: Design of a precision two-dimensional tip-tilting stage system for autocollimator-based long trace profiler angular calibration

Authors:
; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1172991
Resource Type:
Conference
Resource Relation:
Conference: Advances in Metrology for X-Ray and EUV Optics V;;
Publisher:
Advances in Metrology for X-Ray and EUV Optics V;SPIE;92060H-1-92060H-8
Research Org:
Advanced Photon Source (APS), Argonne National Laboratory (ANL), Argonne, IL (US)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
Language:
ENGLISH