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Title: Electrostatic MEMS devices with high reliability

The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.
Authors:
; ; ; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1170735
Report Number(s):
8,963,659
13/114,945
DOE Contract Number:
FG02-02ER46016
Resource Type:
Patent
Resource Relation:
Patent File Date: 2011 May 24
Research Org:
Chicago Operations Office, Argonne, IL (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING