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Title: Thin film application device and method for coating small aperture vacuum vessels

A device and method for coating an inside surface of a vessel is provided. In one embodiment, a coating device comprises a power supply and a diode in electrical communication with the power supply, wherein electrodes comprising the diode reside completely within the vessel. The method comprises reversibly sealing electrodes in a vessel, sputtering elemental metal or metal compound on the surface while maintaining the surface in a controlled atmosphere.
Authors:
;
Publication Date:
OSTI Identifier:
1168692
Report Number(s):
8,940,140
11/850,409
Resource Type:
Patent
Research Org:
Uchicago Argonne, LLC, Chicago, IL (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 36 MATERIALS SCIENCE